EXPLOITING NONLINEAR BAHAVIOR OF MEMS RESONATORS FOR FILTER APPLICATIONS

Abstract
We propose combining the hardening and softening nonlinearities of two resonators to realize a near flat pass band filter of almost zero roll-off. The device is composed of two near identical doubly clamped and laterally actuated microbeams made of Silicon. One of the resonators is buckled via thermal loading to produce softening resonance peak. It is then further tuned to create the desired overlap with the hardening resonance peak of the other resonator. This overlapping improves the filter’s pass band flatness and roll-off characteristics, which are highly desirable. This technique can be promising for future generation of filters with superior characteristics.

Citation
Ilyas, S., & Younis, M. I. (2017). Exploiting Nonlinear Behavior of MEMS Resonators for Filter Applications. Volume 4: 22nd Design for Manufacturing and the Life Cycle Conference; 11th International Conference on Micro- and Nanosystems. doi:10.1115/detc2017-67863

Acknowledgements
This work has been supported through King Abdullah University of Science and Technology (KAUST) research funds.

Conference/Event Name
11thInternational Conference on Micro an Nanosystems

DOI
10.1115/DETC2017-67863

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