Piezoelectric transducer array microspeaker

Abstract
In this paper we present the fabrication and characterization of a piezoelectric micro-speaker. The speaker is an array of micro-machined piezoelectric membranes, fabricated on silicon wafer using advanced micro-machining techniques. Each array contains 2n piezoelectric transducer membranes, where “n” is the bit number. Every element of the array has a circular shape structure. The membrane is made out four layers: 300nm of platinum for the bottom electrode, 250nm or lead zirconate titanate (PZT), a top electrode of 300nm and a structural layer of 50

Citation
Arevalo A, Conchouso D, Castro D, Kosel J, Foulds IG (2016) Piezoelectric transducer array microspeaker. 2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS). Available: http://dx.doi.org/10.1109/NEMS.2016.7758227.

Publisher
Institute of Electrical and Electronics Engineers (IEEE)

Journal
2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)

DOI
10.1109/NEMS.2016.7758227

Additional Links
http://ieeexplore.ieee.org/document/7758227/

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