Experimental investigation of snap-through motion of in-plane MEMS shallow arches under electrostatic excitation

Abstract
We present an experimental investigation for the nonlinear dynamic behaviors of clamped–clamped in-plane MEMS shallow arches when excited by harmonic electrostatic forces. Frequency sweeps are conducted to study the dynamic behaviors in the neighborhoods of the first and third resonance frequencies as well as the super-harmonic resonances. Experimental results show local softening behavior of small oscillations around the first resonance frequency and hardening behavior at the third resonance frequency for small dc and ac loads. Interesting dynamic snap-through cross-well motions are observed experimentally at high voltages for the first time in the micro-scale world. In addition to the dynamic snap-through motion, the MEMS arch exhibits large oscillations of a continuous band of snap-through motion between the super-harmonic resonance regime and the first primary resonance regime. This continuous band is unprecedented experimentally in the micro/macro world, and is promising for a variety of sensing, actuation and communications applications.

Citation
Ramini, A., Bellaredj, M. L. F., Al Hafiz, M. A., & Younis, M. I. (2015). Experimental investigation of snap-through motion of in-plane MEMS shallow arches under electrostatic excitation. Journal of Micromechanics and Microengineering, 26(1), 015012. doi:10.1088/0960-1317/26/1/015012

Publisher
IOP Publishing

Journal
Journal of Micromechanics and Microengineering

DOI
10.1088/0960-1317/26/1/015012

Additional Links
http://http://iopscience.iop.org/article/10.1088/0960-1317/26/1/015012/meta

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