Surface enhanced thermo lithography

Abstract
We used electroless deposition to fabricate clusters of silver nanoparticles (NPs) on a silicon substrate. These clusters are plasmonics devices that induce giant electromagnetic (EM) field increments. When those EM field are absorbed by the metal NPs clusters generate, in turn, severe temperature increases. Here, we used the laser radiation of a conventional Raman set-up to transfer geometrical patterns from a template of metal NPs clusters into a layer of thermo sensitive Polyphthalaldehyde (PPA) polymer. Temperature profile on the devices depends on specific arrangements of silver nanoparticles. In plane temperature variations may be controlled with (i) high nano-meter spatial precision and (ii) single Kelvin temperature resolution on varying the shape, size and spacing of metal nanostructures. This scheme can be used to generate strongly localized heat amplifications for applications in nanotechnology, surface enhanced thermo-lithography (SETL), biology and medicine (for space resolved cell ablation and treatment), nano-chemistry.

Citation
Coluccio ML, Alabastri A, Bonanni S, Majewska R, Dattoli E, et al. (2017) Surface enhanced thermo lithography. Microelectronic Engineering. Available: http://dx.doi.org/10.1016/j.mee.2017.01.004.

Acknowledgements
This work has been partially funded from the Ministry of Health, Italy (Project n. GR-201s0-2320665).

Publisher
Elsevier BV

Journal
Microelectronic Engineering

DOI
10.1016/j.mee.2017.01.004

Additional Links
http://www.sciencedirect.com/science/article/pii/S0167931717300047

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