Displacement and resonance behaviors of a piezoelectric diaphragm driven by a double-sided spiral electrode

Type
Article

Authors
Shen, Zhiyuan
Olfatnia, Mohammad
Miao, Jianmin
Wang, Zhihong

KAUST Department
Imaging and Characterization Core Lab
Advanced Nanofabrication, Imaging and Characterization Core Lab
Core Labs

Online Publication Date
2012-04-03

Print Publication Date
2012-05-01

Date
2012-04-03

Abstract
This paper presents the design of a lead zirconate titanate (PZT) diaphragm actuated by double-sided patterned electrodes. Au/Cr electrodes were deposited on bulk PZT wafers by sputtering while patterned by a lift-off process. SU-8 thick film was used to form the structural layer. Double-spiral electrode induced in-plane poling and piezoelectric elongation are converted to an out-of-plane displacement due to the confined boundary condition. The influence of different drive configurations and electrode parameters on deflection has been calculated by finite element methods (FEM) using a uniform field model. Impedance and quasi-static displacement spectra of the diaphragm were measured after poling. Adouble-sided patterned electrode diaphragm can be actuated by more drive configurations than a single-sided one. Compared with a single-sided electrode drive, a double-sided out-of-phase drive configuration increases the coupling coefficient of the fundamental resonance from 7.6% to 11.8%. The displacement response of the diaphragm increases from 2.6 to 8.6nmV 1. Configurations including the electric field component perpendicular to the poling direction can stimulate shear modes of the diaphragm. © 2012 IOP Publishing Ltd.

Citation
Shen, Z., Olfatnia, M., Miao, J., & Wang, Z. (2012). Displacement and resonance behaviors of a piezoelectric diaphragm driven by a double-sided spiral electrode. Smart Materials and Structures, 21(5), 055001. doi:10.1088/0964-1726/21/5/055001

Publisher
IOP Publishing

Journal
Smart Materials and Structures

DOI
10.1088/0964-1726/21/5/055001

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