Displacement and resonance behaviors of a piezoelectric diaphragm driven by a double-sided spiral electrode


Shen, Zhiyuan
Olfatnia, Mohammad
Miao, Jianmin
Wang, Zhihong

KAUST Department
Imaging and Characterization Core Lab
Advanced Nanofabrication, Imaging and Characterization Core Lab
Core Labs

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This paper presents the design of a lead zirconate titanate (PZT) diaphragm actuated by double-sided patterned electrodes. Au/Cr electrodes were deposited on bulk PZT wafers by sputtering while patterned by a lift-off process. SU-8 thick film was used to form the structural layer. Double-spiral electrode induced in-plane poling and piezoelectric elongation are converted to an out-of-plane displacement due to the confined boundary condition. The influence of different drive configurations and electrode parameters on deflection has been calculated by finite element methods (FEM) using a uniform field model. Impedance and quasi-static displacement spectra of the diaphragm were measured after poling. Adouble-sided patterned electrode diaphragm can be actuated by more drive configurations than a single-sided one. Compared with a single-sided electrode drive, a double-sided out-of-phase drive configuration increases the coupling coefficient of the fundamental resonance from 7.6% to 11.8%. The displacement response of the diaphragm increases from 2.6 to 8.6nmV 1. Configurations including the electric field component perpendicular to the poling direction can stimulate shear modes of the diaphragm. © 2012 IOP Publishing Ltd.

Shen, Z., Olfatnia, M., Miao, J., & Wang, Z. (2012). Displacement and resonance behaviors of a piezoelectric diaphragm driven by a double-sided spiral electrode. Smart Materials and Structures, 21(5), 055001. doi:10.1088/0964-1726/21/5/055001

IOP Publishing

Smart Materials and Structures


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