An investigation of the static and dynamic behavior of electrically actuated rectangular microplates

Type
Article

Authors
Saghir, Shahid
Younis, Mohammad I.

KAUST Department
Mechanical Engineering Program
Physical Science and Engineering (PSE) Division

Online Publication Date
2016-06-22

Print Publication Date
2016-10

Date
2016-06-22

Abstract
We present an investigation of the static and dynamic behavior of the nonlinear von-Karman plates when actuated by the nonlinear electrostatic forces. The investigation is based on a reduced order model developed using the Galerkin method, which rely on modeshapes and in-plane shape functions extracted using a finite element method. In this study, a fully clamped microplate is considered. We investigate the static behavior and the effect of different non-dimensional design parameters. The static results are validated by comparison with the results calculated by a finite element model. The forced-vibration response of the plate is then investigated when the plate is excited by a harmonic AC load superimposed to a DC load. The dynamic behavior is examined near the primary and secondary (superharmonic and subharmonic) resonances. The microplate shows a strong hardening behavior due to the cubic nonlinearity of mid-plane stretching. However, the behavior switches to softening as the DC load is increased. Finally, near-square plates are studied to understand the effect of geometric imperfections of microplates.

Citation
An investigation of the static and dynamic behavior of electrically actuated rectangular microplates 2016, 85:81 International Journal of Non-Linear Mechanics

Publisher
Elsevier BV

Journal
International Journal of Non-Linear Mechanics

DOI
10.1016/j.ijnonlinmec.2016.06.004

Additional Links
http://linkinghub.elsevier.com/retrieve/pii/S0020746216300592

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