Electrothermally actuated tunable clamped-guided resonant microbeams

Type
Article

Authors
Alcheikh, Nouha
Hajjaj, Amal
Jaber, Nizar
Younis, Mohammad I.

KAUST Department
Mechanical Engineering Program
Physical Science and Engineering (PSE) Division

Online Publication Date
2017-06-11

Print Publication Date
2018-01

Date
2017-06-11

Abstract
We present simulation and experimental investigation demonstrating active alteration of the resonant and frequency response behavior of resonators by controlling the electrothermal actuation method on their anchors. In-plane clamped-guided arch and straight microbeams resonators are designed and fabricated with V-shaped electrothermal actuators on their anchors. These anchors not only offer various electrothermal actuation options, but also serve as various mechanical stiffness elements that affect the operating resonance frequency of the structures. We have shown that for an arch, the first mode resonance frequency can be increased up to 50% of its initial value. For a straight beam, we have shown that before buckling, the resonance frequency decreases to very low values and after buckling, it increases up to twice of its initial value. These results can be promising for the realization of different wide–range tunable microresonator. The experimental results have been compared to multi-physics finite-element simulations showing good agreement among them.

Citation
Alcheikh N, Hajjaj AZ, Jaber N, Younis MI (2018) Electrothermally actuated tunable clamped-guided resonant microbeams. Mechanical Systems and Signal Processing 98: 1069–1076. Available: http://dx.doi.org/10.1016/j.ymssp.2017.05.049.

Acknowledgements
This research has been supported by KAUST.

Publisher
Elsevier BV

Journal
Mechanical Systems and Signal Processing

DOI
10.1016/j.ymssp.2017.05.049

Additional Links
http://www.sciencedirect.com/science/article/pii/S0888327017303102

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