Metrology System Based on Metasurface Implementation of Artificial Inteligence

Abstract

Optical instrumentation is ubiquitous across scientific disciplines and industrial settings for its ability to deliver non-destructive and high accuracy mesurements [1]. However, as global manufacturing transitions an automated industry paradigm, the need for highly integrated metrology systems for autonomous machines cannot be addressed traditional bulk optics based equipment [2]. Metasurfaces provide a possible solution to this challenge, enabling near-arbitrary light control functionality in a compact form factor [3]–[5].