On-chip photoacoustic transducer based on monolithic integration of piezoelectric micromachined ultrasonic transducers and metasurface lenses

Abstract
An on-chip photoacoustic transducer is proposed by monolithically integrating piezoelectric micromachined ultrasonic transducers (PMUTs) on metasurface lenses for applications such as single-cell metabolic photoacoustic microscopy (SCM-PAM)1 . As shown in Figure 1a, every PMUT cell has a ring-shaped top electrode, and the membrane center is transparent without piezoelectric and electrode materials. The laser beam, therefore, can travel through a PMUT cell after being focused by a metasurface lens bonded on the backside of the PMUT (see Figure.3). The on-chip photoacoustic transducer fully leverages current PMUT and metasurface technologies and does not rely on transparent piezoelectric and electrode materials like typical transparent ultrasonic transducers2 . Moreover, the on-chip photoacoustic transducer has a monolithic integrated achromatic metasurface lens (see Figure 3), which can easily and efficiently focus the visible light (wavelength range: 400-700 nm) at the same focus point. Design and process this and preliminarily test the performance of PMUT and metasurface.

Citation
Zhai, Y., Sasaki, T., Moridi, M., Lin, R., Alnakhli, Z., Shamim, A., Li, X., Younis, M., Hane, K., & Wu, L. (2023). On-chip photoacoustic transducer based on monolithic integration of piezoelectric micromachined ultrasonic transducers and metasurface lenses. Photons Plus Ultrasound: Imaging and Sensing 2023. https://doi.org/10.1117/12.2649216

Acknowledgements
We thank Waleed Maqsood for testing PMUT. Thanks to Javad Abbaszadeh for designing the PCB and helping with the vibration measurement.

Publisher
SPIE

Conference/Event Name
SPIE BIOS Photons Plus Ultrasound: Imaging and Sensing 2023

DOI
10.1117/12.2649216

Additional Links
https://www.spiedigitallibrary.org/conference-proceedings-of-spie/12379/2649216/On-chip-photoacoustic-transducer-based-on-monolithic-integration-of-piezoelectric/10.1117/12.2649216.full

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