On-chip photoacoustic transducer based on monolithic integration of piezoelectric micromachined ultrasonic transducers and metasurface lenses
Type
Conference PaperPoster
Authors
Zhai, YanfenSasaki, Takashi
Moridi, Mohssen
Lin, Ronghui

Alnakhli, Zahrah
Shamim, Atif

Li, Xiaohang

Younis, Mohammad I.

Hane, Kazuhiro
Wu, Lixiang
KAUST Department
Computer, Electrical and Mathematical Science and Engineering (CEMSE) DivisionPhysical Science and Engineering (PSE) Division
Electrical and Computer Engineering Program
Mechanical Engineering Program
Date
2023-03-09Permanent link to this record
http://hdl.handle.net/10754/690335
Metadata
Show full item recordAbstract
An on-chip photoacoustic transducer is proposed by monolithically integrating piezoelectric micromachined ultrasonic transducers (PMUTs) on metasurface lenses for applications such as single-cell metabolic photoacoustic microscopy (SCM-PAM)1 . As shown in Figure 1a, every PMUT cell has a ring-shaped top electrode, and the membrane center is transparent without piezoelectric and electrode materials. The laser beam, therefore, can travel through a PMUT cell after being focused by a metasurface lens bonded on the backside of the PMUT (see Figure.3). The on-chip photoacoustic transducer fully leverages current PMUT and metasurface technologies and does not rely on transparent piezoelectric and electrode materials like typical transparent ultrasonic transducers2 . Moreover, the on-chip photoacoustic transducer has a monolithic integrated achromatic metasurface lens (see Figure 3), which can easily and efficiently focus the visible light (wavelength range: 400-700 nm) at the same focus point. Design and process this and preliminarily test the performance of PMUT and metasurface.Citation
Zhai, Y., Sasaki, T., Moridi, M., Lin, R., Alnakhli, Z., Shamim, A., Li, X., Younis, M., Hane, K., & Wu, L. (2023). On-chip photoacoustic transducer based on monolithic integration of piezoelectric micromachined ultrasonic transducers and metasurface lenses. Photons Plus Ultrasound: Imaging and Sensing 2023. https://doi.org/10.1117/12.2649216Sponsors
We thank Waleed Maqsood for testing PMUT. Thanks to Javad Abbaszadeh for designing the PCB and helping with the vibration measurement.Publisher
SPIEConference/Event name
SPIE BIOS Photons Plus Ultrasound: Imaging and Sensing 2023ae974a485f413a2113503eed53cd6c53
10.1117/12.2649216