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    Statics and Dynamics of V-shaped Micro-beams Under Axial Forces

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    cnd-20-1473.pdf
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    Description:
    Accepted manuscript
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    Type
    Article
    Authors
    Ouakad, Hassen
    Alcheikh, Nouha
    Ben Mbarek, Sofiane
    Rocha, Rodrigo Tumolin cc
    Younis, Mohammad I. cc
    KAUST Department
    Physical Science and Engineering (PSE) Division
    Mechanical Engineering Program
    Date
    2021-07-08
    Online Publication Date
    2021-07-08
    Print Publication Date
    2021-09-01
    Submitted Date
    2020-12-24
    Permanent link to this record
    http://hdl.handle.net/10754/669362
    
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    Abstract
    Abstract We present an investigation into the static and dynamic behaviors of electrostatically actuated in-plane micro-electro-mechanical V-shaped micro-beam under axial loads. The micro-beams are actuated with two separate electrodes of uniform air-gap across their length. The effects of the initial rise and DC bias voltage are examined while varying the axial loads ranging from compressive to tensile. The numerical analysis is based on a nonlinear equation of motion of a shallow V-shaped micro-beam. The static equation is solved using a reduced-order model based on the Galerkin procedure. Then, the eigenvalue problem of the structure is solved for various equilibrium positions. The analytical model is validated by comparing to an experimental case study. The results show rich and diverse static and dynamic behavior. It is shown that the micro-beam may exhibit only pull-in or snap-through and pull-in instabilities. Various multi-state and hysterics behaviors are demonstrated when varying the actuation forces and the initial rise. High tunability is demonstrated when varying the axial and DC loads for the first two symmetric vibration modes. Such rich behavior can be very useful for high performance micro-scale applications designs.
    Citation
    Ouakad, H., Alcheikh, N., Ben Mbarek, S., Rocha, R., & Younis, M. (2021). Statics and Dynamics of V-shaped Micro-beams Under Axial Forces. Journal of Computational and Nonlinear Dynamics. doi:10.1115/1.4051335
    Sponsors
    This research has been supported through King Abdullah University of Science and Technology (KAUST) fund.
    Publisher
    ASME International
    Journal
    Journal of Computational and Nonlinear Dynamics
    DOI
    10.1115/1.4051335
    Additional Links
    https://asmedigitalcollection.asme.org/computationalnonlinear/article/doi/10.1115/1.4051335/1109882/Statics-and-Dynamics-of-V-shaped-Micro-beams-Under
    ae974a485f413a2113503eed53cd6c53
    10.1115/1.4051335
    Scopus Count
    Collections
    Articles; Physical Science and Engineering (PSE) Division; Mechanical Engineering Program

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