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dc.contributor.authorBabatain, Wedyan
dc.contributor.authorBhattacharjee, Sumana
dc.contributor.authorHussain, Aftab M.
dc.contributor.authorHussain, Muhammad Mustafa
dc.date.accessioned2021-03-21T10:44:21Z
dc.date.available2021-03-21T10:44:21Z
dc.date.issued2021-01-15
dc.date.submitted2020-08-28
dc.identifier.citationBabatain, W., Bhattacharjee, S., Hussain, A. M., & Hussain, M. M. (2021). Acceleration Sensors: Sensing Mechanisms, Emerging Fabrication Strategies, Materials, and Applications. ACS Applied Electronic Materials. doi:10.1021/acsaelm.0c00746
dc.identifier.issn2637-6113
dc.identifier.issn2637-6113
dc.identifier.doi10.1021/acsaelm.0c00746
dc.identifier.urihttp://hdl.handle.net/10754/668158
dc.description.abstractAccelerometers are among the most mature sensor technologies with a broad range of applications in multiple fields and industries. They represent the most widely used microelectromechanical system (MEMS) devices with excellent and reliable performance. MEMS acceleration sensors established dominance mainly in navigation and control applications. In recent years, however, recent technologies and materials have emerged that introduce novel sensing mechanisms, improve performance, enable customization, reduce cost, and reduce fabrication complexity. Herein, the recent advances in accelerometers based on MEMS and recent emerging technologies are reviewed. This work provides a comprehensive review of accelerometers’ sensing mechanisms and the main characteristics and features of each type of sensor, material, and fabrication strategies used to fabricate them. From the aspect of sensor application, this work focuses on reviewing applications that demonstrate the use of accelerometers manufactured using unconventional technologies and materials in prevailing fields such as healthcare monitoring, automotive industry, navigation, building, and structural monitoring. Moreover, challenges and future efforts needed to be addressed in this field are summarized.
dc.description.sponsorshipWe acknowledge the generous support of King Abdullah University of Science and Technology. We also thank Kelly Rader for proofreading this manuscript.
dc.description.sponsorshipThis publication is based upon work supported by the King Abdullah University of Science and Technology (KAUST) Office of Sponsored Research (OSR) under Award No. REP/ 1/2880-01-01.
dc.publisherAmerican Chemical Society (ACS)
dc.relation.urlhttps://pubs.acs.org/doi/10.1021/acsaelm.0c00746
dc.rightsThis document is the Accepted Manuscript version of a Published Work that appeared in final form in ACS Applied Electronic Materials, copyright © American Chemical Society after peer review and technical editing by the publisher. To access the final edited and published work see https://pubs.acs.org/doi/10.1021/acsaelm.0c00746.
dc.titleAcceleration Sensors: Sensing Mechanisms, Emerging Fabrication Strategies, Materials, and Applications
dc.typeArticle
dc.contributor.departmentComputer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division
dc.contributor.departmentElectrical Engineering
dc.contributor.departmentElectrical Engineering Program
dc.contributor.departmentIntegrated Nanotechnology Lab
dc.contributor.departmentMMH Laboratories, Electrical Engineering, Computer Electrical Mathematical Science and Engineering Division, King Abdullah University of Science and Technology (KAUST), Thuwal 23955-6900, Saudi Arabia
dc.contributor.departmentPhysical Science and Engineering (PSE) Division
dc.identifier.journalACS Applied Electronic Materials
dc.rights.embargodate2022-01-15
dc.eprint.versionPost-print
dc.contributor.institutionCenter for VLSI and Embedded Systems Technology (CVEST), International Institute of Information Technology (IIIT), Hyderabad, Telangana 500032, India
dc.contributor.institutionDepartment of Electrical Engineering and Computer Sciences (EECS), University of California, Berkeley, California 94720, United States
kaust.personBabatain, Wedyan
kaust.personBhattacharjee, Sumana
kaust.personHussain, Muhammad Mustafa
kaust.grant.numberREP/ 1/2880-01-01
dc.date.accepted2020-11-24
dc.identifier.eid2-s2.0-85099993587
kaust.acknowledged.supportUnitOSR


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