Acceleration Sensors: Sensing Mechanisms, Emerging Fabrication Strategies, Materials, and Applications
KAUST DepartmentElectrical Engineering Program
Physical Science and Engineering (PSE) Division
Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division
MMH Laboratories, Electrical Engineering, Computer Electrical Mathematical Science and Engineering Division, King Abdullah University of Science and Technology (KAUST), Thuwal 23955-6900, Saudi Arabia
KAUST Grant NumberREP/ 1/2880-01-01
Embargo End Date2022-01-15
Permanent link to this recordhttp://hdl.handle.net/10754/668158
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AbstractAccelerometers are among the most mature sensor technologies with a broad range of applications in multiple fields and industries. They represent the most widely used microelectromechanical system (MEMS) devices with excellent and reliable performance. MEMS acceleration sensors established dominance mainly in navigation and control applications. In recent years, however, recent technologies and materials have emerged that introduce novel sensing mechanisms, improve performance, enable customization, reduce cost, and reduce fabrication complexity. Herein, the recent advances in accelerometers based on MEMS and recent emerging technologies are reviewed. This work provides a comprehensive review of accelerometers’ sensing mechanisms and the main characteristics and features of each type of sensor, material, and fabrication strategies used to fabricate them. From the aspect of sensor application, this work focuses on reviewing applications that demonstrate the use of accelerometers manufactured using unconventional technologies and materials in prevailing fields such as healthcare monitoring, automotive industry, navigation, building, and structural monitoring. Moreover, challenges and future efforts needed to be addressed in this field are summarized.
CitationBabatain, W., Bhattacharjee, S., Hussain, A. M., & Hussain, M. M. (2021). Acceleration Sensors: Sensing Mechanisms, Emerging Fabrication Strategies, Materials, and Applications. ACS Applied Electronic Materials. doi:10.1021/acsaelm.0c00746
SponsorsWe acknowledge the generous support of King Abdullah University of Science and Technology. We also thank Kelly Rader for proofreading this manuscript.
This publication is based upon work supported by the King Abdullah University of Science and Technology (KAUST) Office of Sponsored Research (OSR) under Award No. REP/ 1/2880-01-01.
PublisherAmerican Chemical Society (ACS)
JournalACS Applied Electronic Materials