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    Future Aspects of MOCVD Technology for Epitaxial Growth of Semiconductors

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    Type
    Book Chapter
    Authors
    Detchprohm, T.
    Ryou, J.-H.
    Li, Xiaohang cc
    Dupuis, R.D.
    KAUST Department
    Advanced Semiconductor Laboratory
    Computer, Electrical and Mathematical Science and Engineering (CEMSE) Division
    Electrical and Computer Engineering Program
    Physical Science and Engineering (PSE) Division
    Date
    2019-08-30
    Permanent link to this record
    http://hdl.handle.net/10754/667775
    
    Metadata
    Show full item record
    Abstract
    This chapter explores the characteristics of metalorganic chemical vapor deposition (MOCVD) and discusses possible future trends in the development and application of this epitaxial materials technology to future electronic and optoelectronic devices. It focuses on the needs of different III-nitride materials and devices as examples to describe the state-of-the-art and emerging MOCVD technologies. In addition, the chapter discusses MOCVD innovation for emerging related materials such as Ga2O3. The II-VI compound semiconductors discussed in the chapter are formed by the Group 12 elements Zn, Cd, and Hg, and the Group 16 elements S, Se, and Te. Extrapolating from the recent past, it is relatively easy to predict the continued expansion of MOCVD materials grown for both research and commercial applications. The chapter addresses some specific commercial device applications of MOCVD-grown materials.
    Citation
    Detchprohm, T., Ryou, J. -H., Li, X., & Dupuis, R. D. (2019). Future Aspects of MOCVD Technology for Epitaxial Growth of Semiconductors. Metalorganic Vapor Phase Epitaxy (MOVPE), 507–548. doi:10.1002/9781119313021.ch14
    Publisher
    Wiley
    ISBN
    9781119313014
    9781119313021
    DOI
    10.1002/9781119313021.ch14
    Additional Links
    https://onlinelibrary.wiley.com/doi/abs/10.1002/9781119313021.ch14
    ae974a485f413a2113503eed53cd6c53
    10.1002/9781119313021.ch14
    Scopus Count
    Collections
    Physical Science and Engineering (PSE) Division; Electrical and Computer Engineering Program; Book Chapters; Computer, Electrical and Mathematical Science and Engineering (CEMSE) Division

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