Online Publication Date2021-02-02
Print Publication Date2021-03
Permanent link to this recordhttp://hdl.handle.net/10754/667176
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AbstractWe present a low power high sensitive in-plane resonant bidirectional Lorentz-force magnetic micro-sensor operating in air at ambient pressure. The concept is based on the detection of the resonance frequency shift of an electrothermally straight micro-beam resonator operated near the buckling point. Powered at 20 μW, the micro-sensor shows a measured sensitivity (S) of 3.32/(mA.T), which is very high compared to the state of the art. The proposed method is simple in design making it promising for achieving practical low-cost magnetometer.
CitationAlcheikh, N., & Younis, M. I. (2021). Resonator-Based Bidirectional Lorentz Force Magnetic Sensor. IEEE Electron Device Letters, 1–1. doi:10.1109/led.2021.3055896
SponsorsThis publication is based upon work supported by King Abdullah University of Science and Technology (KAUST).
JournalIEEE Electron Device Letters