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    Nanoscale compositional analysis of wurtzite BAlN thin film using atom probe tomography

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    Nanoscale_nanoscale.pdf
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    1.154Mb
    Format:
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    Description:
    published version
    Embargo End Date:
    2021-12-07
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    Type
    Article
    Authors
    Sarker, Jith
    Tran, Tinh Binh cc
    AlQatari, Feras S. cc
    Liao, Che-Hao cc
    Li, Xiaohang cc
    Mazumder, Baishakhi cc
    KAUST Department
    Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division
    Material Science and Engineering Program
    Physical Science and Engineering (PSE) Division
    Electrical Engineering Program
    Date
    2020-12-07
    Embargo End Date
    2021-12-07
    Submitted Date
    2020-08-31
    Permanent link to this record
    http://hdl.handle.net/10754/666304
    
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    Abstract
    In this work, the local atomic level composition of BAlN films with 20% B was investigated using atom probe tomography. Dislocations and elemental clustering were confirmed along which Al atoms tend to segregate. The presence of local compositional heterogeneities (dislocations and small clusters) and impurities is related to the variation of local alloy stoichiometry of the BAlN films. The roughness and interface abruptness of BAlN/AlN were investigated, and a few nm of B and Al composition gradient in BAlN adjacent to the interface was observed. The nanoscale compositional analysis reported here will be crucial for developing BAlN films with a high B content and larger thickness for future high power electronics and optical applications.
    Citation
    Sarker, J., Tran, T. B., AlQatari, F., Liao, C.-H., Li, X., & Mazumder, B. (2020). Nanoscale compositional analysis of wurtzite BAlN thin film using atom probe tomography. Applied Physics Letters, 117(23), 232103. doi:10.1063/5.0027861
    Publisher
    AIP Publishing
    Journal
    Applied Physics Letters
    DOI
    10.1063/5.0027861
    Additional Links
    http://aip.scitation.org/doi/10.1063/5.0027861
    ae974a485f413a2113503eed53cd6c53
    10.1063/5.0027861
    Scopus Count
    Collections
    Articles; Physical Science and Engineering (PSE) Division; Electrical Engineering Program; Material Science and Engineering Program; Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division

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