Multiple epitaxial lateral overgrowth of GaN thin films using a patterned graphene mask by metal organic chemical vapor deposition
Type
ArticleAuthors
Lee, Jun-YeobMin, Jung-Hong
Bae, Si-Young
Park, Mun-Do
Jeong, Woo-Lim
Park, Jeong-Hwan
Kang, Chang-Mo
Lee, Dong-Seon
Date
2020-11-17Online Publication Date
2020-11-17Print Publication Date
2020-12-01Submitted Date
2020-07-10Permanent link to this record
http://hdl.handle.net/10754/666052
Metadata
Show full item recordAbstract
Single-crystal gallium nitride (GaN) thin films were grown using a graphene mask via multiple epitaxial lateral overgrowth (multiple-ELOG). During the growth process, the graphene mask self-decomposed to enable the emergence of a GaN film with a thickness of several hundred nanometres. This is in contrast to selective area growth of GaN using an SiO2 mask leading to the well known hexagonal-pyramid shape under the same growth conditions. The multiple-ELOG GaN had a single-crystalline wurtzite structure corresponding to the crystallinity of the GaN template, which was confirmed with electron backscatter diffraction measurements. An X-ray diffraction rocking curve of the asymmetric 102 reflection showed that the FWHM for the multiple-ELOG GaN decreased to 405 from 540′′ for the underlying GaN template. From these results, the self-decomposition of the graphene mask during ELOG was experimentally proven to be affected by the GaN decomposition rather than the high-temperature/H2 growth conditions.Citation
Lee, J.-Y., Min, J.-H., Bae, S.-Y., Park, M.-D., Jeong, W.-L., Park, J.-H., … Lee, D.-S. (2020). Multiple epitaxial lateral overgrowth of GaN thin films using a patterned graphene mask by metal organic chemical vapor deposition. Journal of Applied Crystallography, 53(6). doi:10.1107/s1600576720012856Sponsors
This work was supported in part by a GIST Research Institute(GRI) grant funded by the GIST, and by Samsung Electronicsin 2020.Additional Links
https://scripts.iucr.org/cgi-bin/paper?S1600576720012856ae974a485f413a2113503eed53cd6c53
10.1107/s1600576720012856