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dc.contributor.authorRehman, Mutee Ur
dc.contributor.authorBabatain, Wedyan
dc.contributor.authorShaikh, Sohail F.
dc.contributor.authorConchouso Gonzalez, David
dc.contributor.authorQaiser, Nadeem
dc.contributor.authorHussain, Muhammad Mustafa
dc.contributor.authorRojas, Jhonathan Prieto
dc.date.accessioned2020-10-29T13:18:30Z
dc.date.available2020-10-29T13:18:30Z
dc.date.issued2020-10-19
dc.date.submitted2020-07-22
dc.identifier.citationRehman, M. U., Babatain, W., Shaikh, S. F., Conchouso, D., Qaiser, N., Hussain, M. M., & Rojas, J. P. (2020). Stress concentration analysis and fabrication of silicon (100) based ultra-stretchable structures with parylene coating. Extreme Mechanics Letters, 101052. doi:10.1016/j.eml.2020.101052
dc.identifier.issn2352-4316
dc.identifier.doi10.1016/j.eml.2020.101052
dc.identifier.urihttp://hdl.handle.net/10754/665720
dc.description.abstractResearch in stretchable electronics is helping to revolutionize the current electronic industry, particularly in wearable and bio-integrated devices. Cost-effectiveness and easy manufacturing are key factors that contribute to shaping the fate of such technologies. In this work, we present a fabrication method for a novel ultra-stretchable, serpentine-arm spiral (SAS) that was built using a low-cost, standard bulk silicon (100) wafer. However, structural defects that often appear during patterning processes, can lead to stress concentration and structural failure at these sites upon stretching. Parylene coating of the structures is proposed to minimize this stress concentration and improve structure's robustness. Finite element analysis (FEA) was performed to demonstrate the concentration of stress at these defective sites with 2 sizes (0.1μm and 1μm) and at different locations along the arms. Results show that SAS structures reach up to ∼80% stress reduction at the defective location compared to straight-arm spirals, while the parylene-coating helps to reduce it up to ∼60% further. On the other hand, fabricated uncoated, SAS structures reached up to ∼600% prescribed strain before fracture, while parylene-coating improves this maximum admissible strain in ∼50%. Additionally, a cyclic tensile test was then performed on the fabricated structures, uncoated and parylene-coated, for over 3000 cycles without fracture. The results observed on coated structures greatly improve the mechanical reliance of such brittle structures, which could be extended to other stretchable configurations.
dc.description.sponsorshipThe authors would like to acknowledge the support provided by the Deanship of Scientific Research (DSR) at King Fahd University of Petroleum & Minerals (KFUPM), Saudi Arabia for funding this work through projects No. IN161020 and No. KAUST001.
dc.publisherElsevier BV
dc.relation.urlhttps://linkinghub.elsevier.com/retrieve/pii/S2352431620302522
dc.rightsNOTICE: this is the author’s version of a work that was accepted for publication in Extreme Mechanics Letters. Changes resulting from the publishing process, such as peer review, editing, corrections, structural formatting, and other quality control mechanisms may not be reflected in this document. Changes may have been made to this work since it was submitted for publication. A definitive version was subsequently published in Extreme Mechanics Letters, [41, , (2020-10-19)] DOI: 10.1016/j.eml.2020.101052 . © 2020. This manuscript version is made available under the CC-BY-NC-ND 4.0 license http://creativecommons.org/licenses/by-nc-nd/4.0/
dc.titleStress concentration analysis and fabrication of silicon (100) based ultra-stretchable structures with parylene coating
dc.typeArticle
dc.contributor.departmentComputational Bioscience Research Center (CBRC)
dc.contributor.departmentComputer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division
dc.contributor.departmentElectrical Engineering
dc.contributor.departmentElectrical Engineering Program
dc.contributor.departmentIntegrated Nanotechnology Lab
dc.identifier.journalExtreme Mechanics Letters
dc.rights.embargodate2022-04-20
dc.eprint.versionPost-print
dc.contributor.institutionElectrical Engineering, King Fahd University of Petroleum and Minerals, Dhahran 31261, Saudi Arabia
dc.contributor.institutionEscuela de Ingeniería, Universidad Anáhuac Puebla, Puebla 72810, México.
dc.identifier.volume41
dc.identifier.pages101052
kaust.personBabatain, Wedyan
kaust.personShaikh, Sohail F.
kaust.personConchouso Gonzalez, David
kaust.personQaiser, Nadeem
kaust.personHussain, Muhammad Mustafa
dc.date.accepted2020-10-14
dc.identifier.eid2-s2.0-85092894877
refterms.dateFOA2020-11-01T06:19:20Z
dc.date.published-online2020-10-19
dc.date.published-print2020-11


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