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    Dynamics Characterization of a U-Shaped Micro-Resonator Portal Frame

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    Rocha_et_al_2020_JMEMS (1).pdf
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    Description:
    Accepted Article
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    Type
    Article
    Authors
    Rocha, Rodrigo Tumolin cc
    Alcheikh, Nouha cc
    Khan, Fahimullah cc
    Younis, Mohammad I. cc
    KAUST Department
    Physical Science and Engineering (PSE) Division
    Mechanical Engineering Program
    Date
    2020-09-07
    Online Publication Date
    2020-09-07
    Print Publication Date
    2020-10
    Submitted Date
    2020-07-13
    Permanent link to this record
    http://hdl.handle.net/10754/665059
    
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    Abstract
    We present a study of the natural (resonance) frequencies of a tunable in-plane Microelectromechanical portal frame (U-shape) under DC electrostatic loads. The structure is designed and fabricated to excite the in-plane anti-symmetric (sway, first) and the symmetric (second) modes. Experimental results show high tunability of the resonance frequencies of both modes due to the electrostatic forces. Finite element simulations show good agreement with the experimental measurements. Further simulations are presented for the tunability of the natural frequencies of other higher-order modes using various electrode configurations. Frequency-response curves are presented for pure AC actuation of the first two modes showing strong nonlinear softening behavior due to the geometric nonlinearities of the portal frame. [2020-0269]
    Citation
    Rocha, R. T., Alcheikh, N., Khan, F., & Younis, M. I. (2020). Dynamics Characterization of a U-Shaped Micro-Resonator Portal Frame. Journal of Microelectromechanical Systems, 1–10. doi:10.1109/jmems.2020.3020230
    Publisher
    Institute of Electrical and Electronics Engineers (IEEE)
    Journal
    Journal of Microelectromechanical Systems
    DOI
    10.1109/JMEMS.2020.3020230
    Additional Links
    https://ieeexplore.ieee.org/document/9187530/
    https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=9187530
    ae974a485f413a2113503eed53cd6c53
    10.1109/JMEMS.2020.3020230
    Scopus Count
    Collections
    Articles; Physical Science and Engineering (PSE) Division; Mechanical Engineering Program

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