Dynamics Characterization of a U-Shaped Micro-Resonator Portal Frame

Abstract

We present a study of the natural (resonance) frequencies of a tunable in-plane Microelectromechanical portal frame (U-shape) under DC electrostatic loads. The structure is designed and fabricated to excite the in-plane anti-symmetric (sway, first) and the symmetric (second) modes. Experimental results show high tunability of the resonance frequencies of both modes due to the electrostatic forces. Finite element simulations show good agreement with the experimental measurements. Further simulations are presented for the tunability of the natural frequencies of other higher-order modes using various electrode configurations. Frequency-response curves are presented for pure AC actuation of the first two modes showing strong nonlinear softening behavior due to the geometric nonlinearities of the portal frame. [2020-0269]