Dynamics Characterization of a U-Shaped Micro-Resonator Portal Frame
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2020-09-07Online Publication Date
2020-09-07Print Publication Date
2020-10Submitted Date
2020-07-13Permanent link to this record
http://hdl.handle.net/10754/665059
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We present a study of the natural (resonance) frequencies of a tunable in-plane Microelectromechanical portal frame (U-shape) under DC electrostatic loads. The structure is designed and fabricated to excite the in-plane anti-symmetric (sway, first) and the symmetric (second) modes. Experimental results show high tunability of the resonance frequencies of both modes due to the electrostatic forces. Finite element simulations show good agreement with the experimental measurements. Further simulations are presented for the tunability of the natural frequencies of other higher-order modes using various electrode configurations. Frequency-response curves are presented for pure AC actuation of the first two modes showing strong nonlinear softening behavior due to the geometric nonlinearities of the portal frame. [2020-0269]Citation
Rocha, R. T., Alcheikh, N., Khan, F., & Younis, M. I. (2020). Dynamics Characterization of a U-Shaped Micro-Resonator Portal Frame. Journal of Microelectromechanical Systems, 1–10. doi:10.1109/jmems.2020.3020230Additional Links
https://ieeexplore.ieee.org/document/9187530/https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=9187530
ae974a485f413a2113503eed53cd6c53
10.1109/JMEMS.2020.3020230