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dc.contributor.authorAlcheikh, Nouha
dc.contributor.authorOuakad, Hassen M.
dc.contributor.authorYounis, Mohammad I.
dc.date.accessioned2020-09-07T12:52:56Z
dc.date.available2020-09-07T12:52:56Z
dc.date.issued2020-08-31
dc.date.submitted2020-06-04
dc.identifier.citationAlcheikh, N., Ouakad, H. M., & Younis, M. I. (2020). Dynamics of V-Shaped Electrothermal MEMS-Based Resonators. Journal of Microelectromechanical Systems, 1–10. doi:10.1109/jmems.2020.3018193
dc.identifier.issn1941-0158
dc.identifier.doi10.1109/JMEMS.2020.3018193
dc.identifier.urihttp://hdl.handle.net/10754/664991
dc.description.abstractIn this work, we study experimentally, analytically, and numerically the dynamics of electrothermally actuated micro-electro-mechanical V-shaped micro-beam resonators. Upon actuating the micro-beams electrothermally, we examine the various scenarios of natural frequencies crossing and avoided-crossing (veering) among the various vibration modes. The effect of various parameters is experimentally investigated on the veering and crossing including the micro-beam width and the initial rise at the mid-point. An analytical study is presented based on a reduced order model of a nonlinear Euler-Bernoulli shallow arch beam model. The dynamic behavior is also confirmed through a multi-physics finite-element model (FEM). The static and dynamic behaviors of the V-shaped micro-beams are compared against those of Arc-shaped micro-beams. [2020-0232]
dc.publisherInstitute of Electrical and Electronics Engineers (IEEE)
dc.relation.urlhttps://ieeexplore.ieee.org/document/9181413/
dc.relation.urlhttps://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=9181413
dc.rights(c) 2020 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other users, including reprinting/ republishing this material for advertising or promotional purposes, creating new collective works for resale or redistribution to servers or lists, or reuse of any copyrighted components of this work in other works.
dc.subjectMEMS
dc.subjectV- and arc-shaped micro-resonators
dc.subjectelectrothermal actuation
dc.subjectcrossing and veering phenomenon
dc.subjectparameter study.
dc.titleDynamics of V-Shaped Electrothermal MEMS-Based Resonators
dc.typeArticle
dc.contributor.departmentPhysical Science and Engineering (PSE) Division
dc.contributor.departmentMechanical Engineering Program
dc.identifier.journalJournal of Microelectromechanical Systems
dc.eprint.versionPost-print
dc.contributor.institutionMechanical and Industrial Engineering Department, College of Engineering, Sultan Qaboos University, Muscat 123, Oman
dc.identifier.pages1-10
kaust.personAlcheikh, Nouha
kaust.personYounis, Mohammad I.
dc.date.accepted2020-08-10
dc.date.published-online2020-08-31
dc.date.published-print2020-10


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