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    Dynamics of V-Shaped Electrothermal MEMS-Based Resonators

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    Type
    Article
    Authors
    Alcheikh, Nouha cc
    Ouakad, Hassen M. cc
    Younis, Mohammad I. cc
    KAUST Department
    Physical Science and Engineering (PSE) Division
    Mechanical Engineering Program
    Date
    2020-08-31
    Online Publication Date
    2020-08-31
    Print Publication Date
    2020-10
    Submitted Date
    2020-06-04
    Permanent link to this record
    http://hdl.handle.net/10754/664991
    
    Metadata
    Show full item record
    Abstract
    In this work, we study experimentally, analytically, and numerically the dynamics of electrothermally actuated micro-electro-mechanical V-shaped micro-beam resonators. Upon actuating the micro-beams electrothermally, we examine the various scenarios of natural frequencies crossing and avoided-crossing (veering) among the various vibration modes. The effect of various parameters is experimentally investigated on the veering and crossing including the micro-beam width and the initial rise at the mid-point. An analytical study is presented based on a reduced order model of a nonlinear Euler-Bernoulli shallow arch beam model. The dynamic behavior is also confirmed through a multi-physics finite-element model (FEM). The static and dynamic behaviors of the V-shaped micro-beams are compared against those of Arc-shaped micro-beams. [2020-0232]
    Citation
    Alcheikh, N., Ouakad, H. M., & Younis, M. I. (2020). Dynamics of V-Shaped Electrothermal MEMS-Based Resonators. Journal of Microelectromechanical Systems, 1–10. doi:10.1109/jmems.2020.3018193
    Publisher
    IEEE
    Journal
    Journal of Microelectromechanical Systems
    DOI
    10.1109/JMEMS.2020.3018193
    Additional Links
    https://ieeexplore.ieee.org/document/9181413/
    https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=9181413
    ae974a485f413a2113503eed53cd6c53
    10.1109/JMEMS.2020.3018193
    Scopus Count
    Collections
    Articles; Physical Science and Engineering (PSE) Division; Mechanical Engineering Program

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