Type
ArticleDate
2020-08-31Online Publication Date
2020-08-31Print Publication Date
2020-10Submitted Date
2020-06-04Permanent link to this record
http://hdl.handle.net/10754/664991
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Show full item recordAbstract
In this work, we study experimentally, analytically, and numerically the dynamics of electrothermally actuated micro-electro-mechanical V-shaped micro-beam resonators. Upon actuating the micro-beams electrothermally, we examine the various scenarios of natural frequencies crossing and avoided-crossing (veering) among the various vibration modes. The effect of various parameters is experimentally investigated on the veering and crossing including the micro-beam width and the initial rise at the mid-point. An analytical study is presented based on a reduced order model of a nonlinear Euler-Bernoulli shallow arch beam model. The dynamic behavior is also confirmed through a multi-physics finite-element model (FEM). The static and dynamic behaviors of the V-shaped micro-beams are compared against those of Arc-shaped micro-beams. [2020-0232]Citation
Alcheikh, N., Ouakad, H. M., & Younis, M. I. (2020). Dynamics of V-Shaped Electrothermal MEMS-Based Resonators. Journal of Microelectromechanical Systems, 1–10. doi:10.1109/jmems.2020.3018193Publisher
IEEEAdditional Links
https://ieeexplore.ieee.org/document/9181413/https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=9181413
ae974a485f413a2113503eed53cd6c53
10.1109/JMEMS.2020.3018193