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    Room Temperature Operable Semiconducting Metal Oxide Chemi-Resistive NO2 Gas Sensor

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    IMCS-2020_Abstract_Draft.pdf
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    Description:
    Abstract
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    Type
    Abstract
    Authors
    Vijjapu, Mani Teja
    Surya, Sandeep Goud
    Yuvaraja, Saravanan
    Salama, Khaled N. cc
    KAUST Department
    Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division
    Electrical Engineering
    Electrical Engineering Program
    Sensors Lab
    Date
    2020-05-12
    Online Publication Date
    2020-05-12
    Print Publication Date
    2020-05-01
    Permanent link to this record
    http://hdl.handle.net/10754/662883
    
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    Abstract
    The quest for the room temperature operable semiconducting metal oxide gas sensors has come to an end. We fabricated an InGaZnO based chemi-resistive gas sensor, which is remarkably sensitive and selective to NO2 gas. Conventional semiconducting metal oxide gas sensors are active at high temperatures or in presence of light, which makes them power-hungry. The fabricated sensor is room temperature operable and requires light only to regenerate the device after exposure. NO2 has adverse effects on human health at concentration as low as 2 ppm. The measured limit of detection of the sensor is 100 ppb. Comprehensive NO2 adsorption studies were performed using kelvin probe force microscopy (KPFM) and X-ray photoelectron spectroscopy (XPS). The detailed mechanism of sensing and reviving is proposed. The fabricated sensor is compatible with CMOS process and can be integrated with the CMOS circuitry to make compact sensing system.
    Citation
    Vijjapu, M. T., Surya, S., Yuvaraja, S., & Salama, K. N. (2020). Room Temperature Operable Semiconducting Metal Oxide Chemi-Resistive NO2 Gas Sensor. ECS Meeting Abstracts, MA2020-01(28), 2063–2063. doi:10.1149/ma2020-01282063mtgabs
    Publisher
    The Electrochemical Society
    Journal
    ECS Meeting Abstracts
    DOI
    10.1149/ma2020-01282063mtgabs
    Additional Links
    https://iopscience.iop.org/article/10.1149/MA2020-01282063mtgabs
    ae974a485f413a2113503eed53cd6c53
    10.1149/ma2020-01282063mtgabs
    Scopus Count
    Collections
    Conference Papers; Electrical and Computer Engineering Program; Sensors Lab; Computer, Electrical and Mathematical Science and Engineering (CEMSE) Division

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