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    Steam-Assisted Chemical Vapor Deposition of Zeolitic Imidazolate Framework

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    Type
    Article
    Authors
    Huang, Jing-Kai
    Saito, Noboru
    Cai, Yichen
    Wan, Yi cc
    Cheng, Chia-Chin
    Li, Mengliu cc
    Shi, Junjie
    Tamada, Kaoru cc
    Tung, Vincent cc
    Li, Sean
    Li, Lain-Jong cc
    KAUST Department
    Material Science and Engineering
    Material Science and Engineering Program
    Physical Science and Engineering (PSE) Division
    Date
    2020-04-01
    Online Publication Date
    2020-04-01
    Print Publication Date
    2020-05-04
    Submitted Date
    2020-01-24
    Permanent link to this record
    http://hdl.handle.net/10754/662455
    
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    Abstract
    Direct growth of metal–organic frameworks (MOFs) on substrates is a prerequisite to incorporating them into functional platforms and microdevices. Nevertheless, available reports mostly rely on the solvent-based routes, typically altered from processes for powder synthesis which are obstacles to the nanofabrication. Besides, although few vapor-phase growth approaches were presented, the proposed procedures required multiple steps, such as matrix deposition and post-conversion, to obtain desired MOF films on substrates. Here, we demonstrate a steam-assisted chemical vapor deposition (CVD) method to directly synthesize highly crystalline ZIF-67 thin films at the temperature <125°C. With a slow deposition rate, the ZIF-67 forms a highly oriented thin film on a c-plane sapphire substrate, indicating the growth is epitaxial. Furthermore, we demonstrate the integration of directly grown CVD ZIF-67 as the active material of chemiresistors onto microelectronic chips. The ZIF-67 chemiresistors exhibit responses to the gas molecules, which are capable of diffusing into the cage of ZIF-67 at room temperature. The proposed synthesis method of ZIF-67 thin films is simple, scalable, cost-effective, and promising for numerous applications.
    Citation
    Huang, J.-K., Saito, N., Cai, Y., Wan, Y., Cheng, C.-C., Li, M., … Li, L.-J. (2020). Steam-Assisted Chemical Vapor Deposition of Zeolitic Imidazolate Framework. ACS Materials Letters, 485–491. doi:10.1021/acsmaterialslett.0c00026
    Sponsors
    The authors acknowledge the facilities, as well as the scientific and technical assistance, from the NSW Node of the Australian National Fabrication Facility (ANFF) and the Research & Prototype Foundry Core Research Facility at the University of Sydney, part of the ANFF. The authors also thank the Electron Microscope Unit within the Mark Wainwright Analytical Centre at UNSW Sydney for the use of facilities. N.S. is grateful to the advanced graduate course on molecular systems for devices, a program for leading graduate schools, Kyushu University, Japan.
    Publisher
    American Chemical Society (ACS)
    Journal
    ACS Materials Letters
    DOI
    10.1021/acsmaterialslett.0c00026
    Additional Links
    https://pubs.acs.org/doi/10.1021/acsmaterialslett.0c00026
    ae974a485f413a2113503eed53cd6c53
    10.1021/acsmaterialslett.0c00026
    Scopus Count
    Collections
    Articles; Physical Science and Engineering (PSE) Division; Material Science and Engineering Program

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