A Resonant Gas Sensor Based on Multimode Excitation of a Buckled Microbeam
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ArticleDate
2019-10-30Online Publication Date
2019-10-30Print Publication Date
2020-02-15Permanent link to this record
http://hdl.handle.net/10754/661496
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We report a new gas sensing technique based on the simultaneous tracking of multiple modes of vibration of an electrothermally heated bridge resonator operated near the buckling point. The proposed technique maximizes the sensitivity of the sensor to changes in gases concentrations. We demonstrate a 200% frequency shift in contrast to 0.5% resistance change using the conventional resistive technique. The method also demonstrates selective identification for some gases without the need for surface functionalization of the microstructure. The proposed method is simple in principle and design and is promising for achieving practical low-cost gas sensors.Citation
Hajjaj, A. Z., Jaber, N., Alcheikh, N., & Younis, M. I. (2020). A Resonant Gas Sensor Based on Multimode Excitation of a Buckled Microbeam. IEEE Sensors Journal, 20(4), 1778–1785. doi:10.1109/jsen.2019.2950495Sponsors
This work was supported by the King Abdullah University of Science and Technology (KAUST).Journal
IEEE Sensors JournalAdditional Links
https://ieeexplore.ieee.org/document/8887495/ae974a485f413a2113503eed53cd6c53
10.1109/JSEN.2019.2950495