Diaphragm shape effect on the performance of foil-based capacitive pressure sensors
Type
ArticleKAUST Department
Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) DivisionElectrical Engineering Program
Integrated Nanotechnology Lab
mmh Labs, Electrical Engineering, Computer Electrical Mathematical Science, and Engineering Division (CEMSE), King Abdullah University of Science and Technology (KAUST), Thuwal 23955-6900, Saudi Arabia
Date
2020-01-07Online Publication Date
2020-01-07Print Publication Date
2020-01-01Permanent link to this record
http://hdl.handle.net/10754/661020
Metadata
Show full item recordAbstract
We present detailed shape-based analyses to compare the performance of metal foil-based capacitive pressure sensors based on the shape of the diaphragm (top electrode). We perform a detailed analysis on the use of new material and deflection in various shaped diaphragms to act as a performance indicator for pressure-based capacitive sensors. A low-cost, recyclable, and readily available material is used to present an alternative to the expensive materials used in conventional pressure sensors. Diaphragms of five different shapes (circle, ellipse, pentagon, square, and rectangle) are fabricated and analyzed. Mathematical, FEM, and experimental tests are performed for capacitive sensors fabricated in five different shapes. The mathematically calculated deflection for each shaped diaphragm is compared with the results of the corresponding FEM simulations. Two different experiments are performed to verify the performance of pressure sensors.Citation
Khan, S. M., Mishra, R. B., Qaiser, N., Hussain, A. M., & Hussain, M. M. (2020). Diaphragm shape effect on the performance of foil-based capacitive pressure sensors. AIP Advances, 10(1), 015009. doi:10.1063/1.5128475Publisher
AIP PublishingJournal
AIP AdvancesAdditional Links
http://aip.scitation.org/doi/10.1063/1.5128475https://aip.scitation.org/doi/pdf/10.1063/1.5128475
ae974a485f413a2113503eed53cd6c53
10.1063/1.5128475
Scopus Count
Except where otherwise noted, this item's license is described as This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. The following article appeared in AIP Advances and may be found at http://doi.org/10.1063/1.5128475.