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dc.contributor.authorAlcheikh, Nouha
dc.contributor.authorHajjaj, Amal
dc.contributor.authorYounis, Mohammad I.
dc.date.accessioned2019-11-24T11:51:40Z
dc.date.available2019-11-24T11:51:40Z
dc.date.issued2019-10-05
dc.identifier.citationAlcheikh, N., Hajjaj, A. Z., & Younis, M. I. (2019). Highly sensitive and wide-range resonant pressure sensor based on the veering phenomenon. Sensors and Actuators A: Physical, 300, 111652. doi:10.1016/j.sna.2019.111652
dc.identifier.doi10.1016/j.sna.2019.111652
dc.identifier.urihttp://hdl.handle.net/10754/660201
dc.description.abstractWe report a highly sensitive wide-range resonant pressure sensor. The concept is based on tracking multiple modes of vibration of an electrothermally heated initially curved micro-beam experiencing the veering phenomenon between its first and third vibration modes. For low values of pressure, the third resonance frequency is very sensitive, and thus its variation with pressure is monitored and recorded. As increasing pressure, the resonance frequency of the third mode decreases until reaching the veering phenomenon. At that point, the first mode exchanges role with the third mode, becoming very sensitive, and hence its frequency is tracked afterward as varying pressure. We show that using this concept, the sensitivity of the resonant pressure micro-sensor is significantly enhanced. Finite element method (FEM) simulations and experimental data show that the proposed micro-sensor becomes highly sensitive for wide-range of pressure from 38 mTorr to 200 Torr. The effect of various parameters on the performance of the proposed pressure sensor is investigated including the thickness of the micro-beam, the vacuum chamber size, and the thermal actuation load.
dc.description.sponsorshipThis research has been supported through King Abdullah University of Science and Technology (KAUST) fund.
dc.publisherElsevier BV
dc.relation.urlhttps://linkinghub.elsevier.com/retrieve/pii/S0924424719312403
dc.rightsNOTICE: this is the author’s version of a work that was accepted for publication in Sensors and Actuators, A: Physical. Changes resulting from the publishing process, such as peer review, editing, corrections, structural formatting, and other quality control mechanisms may not be reflected in this document. Changes may have been made to this work since it was submitted for publication. A definitive version was subsequently published in Sensors and Actuators, A: Physical, [[Volume], [Issue], (2019-10-05)] DOI: 10.1016/j.sna.2019.111652 . © 2019. This manuscript version is made available under the CC-BY-NC-ND 4.0 license http://creativecommons.org/licenses/by-nc-nd/4.0/.
dc.rights.urihttp://creativecommons.org/licenses/by-nc-nd/4.0/
dc.subjectResonant pressure sensor
dc.subjectElectrothermal actuation
dc.subjectVeering phenomenon
dc.subjectTwo symmetric vibration modes
dc.subjectClamped-Clamped microbeam
dc.titleHighly sensitive and wide-range resonant pressure sensor based on the veering phenomenon
dc.typeArticle
dc.contributor.departmentMechanical Engineering Program
dc.contributor.departmentPhysical Science and Engineering (PSE) Division
dc.identifier.journalSensors and Actuators A: Physical
dc.rights.embargodate2021-10-05
dc.eprint.versionPost-print
kaust.personAlcheikh, Nouha
kaust.personHajjaj, Amal Z.
kaust.personYounis, Mohammad I.


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NOTICE: this is the author’s version of a work that was accepted for publication in Sensors and Actuators, A: Physical. Changes resulting from the publishing process, such as peer review, editing, corrections, structural formatting, and other quality control mechanisms may not be reflected in this document. Changes may have been made to this work since it was submitted for publication. A definitive version was subsequently published in Sensors and Actuators, A: Physical, [[Volume], [Issue], (2019-10-05)] DOI: 10.1016/j.sna.2019.111652 . © 2019. This manuscript version is made available under the CC-BY-NC-ND 4.0 license http://creativecommons.org/licenses/by-nc-nd/4.0/.
Except where otherwise noted, this item's license is described as NOTICE: this is the author’s version of a work that was accepted for publication in Sensors and Actuators, A: Physical. Changes resulting from the publishing process, such as peer review, editing, corrections, structural formatting, and other quality control mechanisms may not be reflected in this document. Changes may have been made to this work since it was submitted for publication. A definitive version was subsequently published in Sensors and Actuators, A: Physical, [[Volume], [Issue], (2019-10-05)] DOI: 10.1016/j.sna.2019.111652 . © 2019. This manuscript version is made available under the CC-BY-NC-ND 4.0 license http://creativecommons.org/licenses/by-nc-nd/4.0/.