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    On the response of MEMS resonators under generic electrostatic loadings: theoretical analysis

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    Type
    Article
    Authors
    Ilyas, Saad
    Alfosail, Feras cc
    Younis, Mohammad I. cc
    KAUST Department
    Mechanical Engineering
    Mechanical Engineering Program
    Physical Science and Engineering (PSE) Division
    Date
    2019-06-01
    Embargo End Date
    2020-06-01
    Permanent link to this record
    http://hdl.handle.net/10754/656060
    
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    Abstract
    We present an investigation of the dynamic behavior of an electrostatically actuated resonant structure, resonator, under the simultaneous excitation of primary and subharmonic resonances. A comprehensive analytical solution is obtained via the method of Multiple Time Scales (MTS), which is applicable for generic electrostatic loading cases. Results using different MTS scaling methods in the equations of motion and loading conditions are compared. These results are further verified against results obtained using direct time integration of the equation of motion. It is observed that for a generic parallel-plate electrostatic loading case, the direct forcing component at the excitation frequency, and the direct and parametric excitation components at double the excitation frequency must be considered for accurate prediction of the structure’s response. Further, the case of simultaneous excitations of primary and subharmonic resonance, where both excitations are of comparable strength, is examined under various electrostatic loading conditions. We show mixed behaviors of the resonator transiting from a subharmonic-dominated response, characterized by the sudden jumps in amplitude and smaller monostable regime, to primary-dominated response exhibiting gradual amplitude increase and larger monostable regimes. This transition behavior can be potentially used for applications, such as electrometers.
    Citation
    Ilyas, S., Alfosail, F. K., & Younis, M. I. (2019). On the response of MEMS resonators under generic electrostatic loadings: theoretical analysis. Nonlinear Dynamics, 97(2), 967–977. doi:10.1007/s11071-019-05024-3
    Sponsors
    This publication is based upon work supported by the King Abdullah University of Science and Technology (KAUST) research funds.
    Publisher
    Springer Nature
    Journal
    Nonlinear Dynamics
    DOI
    10.1007/s11071-019-05024-3
    Additional Links
    http://link.springer.com/10.1007/s11071-019-05024-3
    ae974a485f413a2113503eed53cd6c53
    10.1007/s11071-019-05024-3
    Scopus Count
    Collections
    Articles; Physical Science and Engineering (PSE) Division; Mechanical Engineering Program

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