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    Modeling and Simulation of A MEMS Resonator Based Reprogrammable Logic Gate Using Partial Electrodes

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    DTIP19-72_high_reso_pic.pdf
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    Description:
    Accepted Manuscript
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    Type
    Conference Paper
    Authors
    Ahmed, Sally
    Li, Ren
    Zou, Xuecui
    Al Hafiz, Md Abdullah
    Fariborzi, Hossein cc
    KAUST Department
    Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division
    KAUST Grant Number
    OSR-2016-CRG5-3001
    Date
    2019-07-04
    Online Publication Date
    2019-07-04
    Print Publication Date
    2019-05
    Permanent link to this record
    http://hdl.handle.net/10754/632553
    
    Metadata
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    Abstract
    In this work, we present a reprogrammable micro-resonator logic gate designed with an industrial standard process. The device operation is based on altering the resonance frequency of the beam using DC digital inputs. The proposed design methodology reduces design complexity by 4 to 10 times compared to traditional CMOS design techniques and has great potential for improving energy efficiency. The proposed device has been simulated by MEMS+ software provided by Coventor using XMB10_M30 process design kit (PDK) and then exported into Cadence for further simulations and layout creation following XMB10 process provided by X-FAB.
    Citation
    Ahmed, S., Li, R., Zou, X., Al Hafiz, M. A., & Fariborzi, H. (2019). Modeling and Simulation of A MEMS Resonator Based Reprogrammable Logic Gate Using Partial Electrodes. 2019 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP). doi:10.1109/dtip.2019.8752880
    Sponsors
    This work is supported by King Abdullah University of Science and Technology (KAUST) office of sponsored research (OSR) under Award No. OSR-2016-CRG5-3001.
    Publisher
    Institute of Electrical and Electronics Engineers (IEEE)
    DOI
    10.1109/DTIP.2019.8752880
    ae974a485f413a2113503eed53cd6c53
    10.1109/DTIP.2019.8752880
    Scopus Count
    Collections
    Conference Papers; Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division

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