Modeling and Simulation of A MEMS Resonator Based Reprogrammable Logic Gate Using Partial Electrodes
Name:
DTIP19-72_high_reso_pic.pdf
Size:
2.266Mb
Format:
PDF
Description:
Accepted Manuscript
Type
Conference PaperKAUST Grant Number
OSR-2016-CRG5-3001Date
2019-07-04Online Publication Date
2019-07-04Print Publication Date
2019-05Permanent link to this record
http://hdl.handle.net/10754/632553
Metadata
Show full item recordAbstract
In this work, we present a reprogrammable micro-resonator logic gate designed with an industrial standard process. The device operation is based on altering the resonance frequency of the beam using DC digital inputs. The proposed design methodology reduces design complexity by 4 to 10 times compared to traditional CMOS design techniques and has great potential for improving energy efficiency. The proposed device has been simulated by MEMS+ software provided by Coventor using XMB10_M30 process design kit (PDK) and then exported into Cadence for further simulations and layout creation following XMB10 process provided by X-FAB.Citation
Ahmed, S., Li, R., Zou, X., Al Hafiz, M. A., & Fariborzi, H. (2019). Modeling and Simulation of A MEMS Resonator Based Reprogrammable Logic Gate Using Partial Electrodes. 2019 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP). doi:10.1109/dtip.2019.8752880Sponsors
This work is supported by King Abdullah University of Science and Technology (KAUST) office of sponsored research (OSR) under Award No. OSR-2016-CRG5-3001.ae974a485f413a2113503eed53cd6c53
10.1109/DTIP.2019.8752880