Show simple item record

dc.contributor.authorJaber, Nizar
dc.contributor.authorIlyas, Saad
dc.contributor.authorShekhah, Osama
dc.contributor.authorEddaoudi, Mohammad
dc.contributor.authorYounis, Mohammad I.
dc.date.accessioned2019-03-04T08:30:54Z
dc.date.available2019-03-04T08:30:54Z
dc.date.issued2018-10-01
dc.identifier.citationJaber N, Ilyas S, Shekhah O, Eddaoudi M, Younis MI (2018) Multimode MEMS Resonator for Simultaneous Sensing of Vapor Concentration and Temperature. IEEE Sensors Journal 18: 10145–10153. Available: http://dx.doi.org/10.1109/JSEN.2018.2872926.
dc.identifier.issn1530-437X
dc.identifier.issn1558-1748
dc.identifier.issn2379-9153
dc.identifier.doi10.1109/JSEN.2018.2872926
dc.identifier.urihttp://hdl.handle.net/10754/631312
dc.description.abstractMost gas sensors suffer from the cross sensitivity to environmental temperature, which significantly reduces the accuracy and reliability of measurements. Current solutions require the fabrication of a thermometer in close proximity to the gas sensor or an identical reference sensor to compensate for the sensor drift due to temperature. This increases the device size, fabrication cost, and the power required to operate the sensor; and also adds to the complexity of the device circuit for signal processing. Here, we demonstrate a single resonant gas sensor, based on a microbeam uniformly coated with metal-organic frameworks (MOFs), capable of simultaneously measuring environmental temperature and gas concentration (water vapor). Using the electrostatic harmonic voltage, we actuate the microbeam simultaneously near the first and second vibration modes. The frequency shifts of these two modes due to physical stimuli changes are monitored in real time. The lower electrode of the clamped-clamped microbeam resonator is perforated to reduce the effect of squeeze film damping, thereby allowing operation under atmospheric pressure. We demonstrate experimentally the effectiveness of this technique to measure the environmental temperature and gas concentration. Based on the theoretical analysis and the Allan deviation results, a minimum detectable temperature of 0.03 °C and water vapor concentration of 4.6 ppm is demonstrated.
dc.description.sponsorshipThis work was supported by the King Abdullah University of Science and Technology. The associate editor coordinating the review of this paper and approving it for publication was Prof. Alper Bozkurt.
dc.publisherInstitute of Electrical and Electronics Engineers (IEEE)
dc.relation.urlhttps://ieeexplore.ieee.org/document/8478213
dc.rights(c) 2018 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other users, including reprinting/ republishing this material for advertising or promotional purposes, creating new collective works for resale or redistribution to servers or lists, or reuse of any copyrighted components of this work in other works.
dc.subjectand resonators
dc.subjectelectrostatic actuation
dc.subjecthumidity and temperature sensing
dc.subjectMOFs coating
dc.subjectMultimodal
dc.titleMultimode MEMS Resonator for Simultaneous Sensing of Vapor Concentration and Temperature
dc.typeArticle
dc.contributor.departmentAdvanced Membranes and Porous Materials Research Center
dc.contributor.departmentMechanical Engineering Program
dc.contributor.departmentPhysical Science and Engineering (PSE) Division
dc.identifier.journalIEEE Sensors Journal
dc.eprint.versionPost-print
kaust.personJaber, Nizar
kaust.personIlyas, Saad
kaust.personShekhah, Osama
kaust.personEddaoudi, Mohammad
kaust.personYounis, Mohammad I.
refterms.dateFOA2019-03-04T08:31:58Z
dc.date.published-online2018-10-01
dc.date.published-print2018-12-15


Files in this item

Thumbnail
Name:
Multimode MEMS Resonator for Simultaneous Sensing of Vapor Concentration and Temperature.pdf
Size:
2.379Mb
Format:
PDF
Description:
Accepted Manuscript

This item appears in the following Collection(s)

Show simple item record