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    Rapid photonic curing of solution-processed In2O3 layers on flexible substrates

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    Type
    Article
    Authors
    Twyman, Nicholas M.
    Tetzner, Kornelius
    Anthopoulos, Thomas D. cc
    Payne, David J.
    Regoutz, Anna
    KAUST Department
    KAUST Solar Center (KSC)
    Material Science and Engineering Program
    Physical Science and Engineering (PSE) Division
    Date
    2019-02-10
    Online Publication Date
    2019-02-10
    Print Publication Date
    2019-06
    Permanent link to this record
    http://hdl.handle.net/10754/631055
    
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    Abstract
    In2O3 is one of the most important semiconducting metal oxides primarily because of its wide band gap, high electron mobility and processing versatility. To this end, high-quality thin films of In2O3 can be prepared using scalable and inexpensive solution-based deposition methods, hence making it attractive for application in a number of emerging electronic applications. However, traditional solution processing often requires high temperature and lengthy annealing steps, making it impossible to use in combination with temperature-sensitive plastic substrates, which would be desired for numerous emerging flexible device applications. Here, rapid photonic curing of In2O3 layers is explored as an alternative to thermal annealing. Oxide thin films are successfully prepared on a range of substrates, including glass, polyimide, and polyethylene naphthalate. The effect of substrate and post-processing treatment on the morphology, surface chemistry, and electronic properties is investigated by atomic force microscopy and X-ray photoelectron spectroscopy. Systematic trends are identified, particularly in the degree of conversion of the precursor and its influence on the electronic structure.
    Citation
    Twyman NM, Tetzner K, Anthopoulos TD, Payne DJ, Regoutz A (2019) Rapid photonic curing of solution-processed In2O3 layers on flexible substrates. Applied Surface Science. Available: http://dx.doi.org/10.1016/j.apsusc.2019.02.038.
    Sponsors
    This work was supported by the Engineering and Physical Sciences Research Council (EPSRC) (Grant No. EP/M028291/1). A.R. acknowledges the support from Imperial College London for her Imperial College Research Fellowship. K.T. acknowledges the financial support from the People Programme (Marie Curie Actions) of the European Union's Framework Programme Horizon 2020: “Flexible Complementary Hybrid Integrated Circuits” (FlexCHIC), Grant Agreement No. 658563. D.-J. P. acknowledges support from the Royal Society for a University Research Fellowship (Grant Nos. UF100105 and UF150693). T.D.A. acknowledges the King Abdullah University of Science and Technology (KAUST) for the financial support. Thanks go to Averey Chan for helpful discussion of the manuscript.
    Publisher
    Elsevier BV
    Journal
    Applied Surface Science
    DOI
    10.1016/j.apsusc.2019.02.038
    Additional Links
    https://www.sciencedirect.com/science/article/pii/S016943321930371X
    ae974a485f413a2113503eed53cd6c53
    10.1016/j.apsusc.2019.02.038
    Scopus Count
    Collections
    Articles; Physical Science and Engineering (PSE) Division; Material Science and Engineering Program; KAUST Solar Center (KSC)

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