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dc.contributor.authorAlcheikh, Nouha
dc.contributor.authorKosuru, Lakshmoji
dc.contributor.authorKazmi, Syed
dc.contributor.authorYounis, Mohammad I.
dc.date.accessioned2018-12-31T14:14:21Z
dc.date.available2018-12-31T14:14:21Z
dc.date.issued2018-12-13
dc.identifier.citationAlcheikh N, Kosuru L, Kazmi SNR, Younis MI (2018) In-Plane Air Damping of NEMS and MEMS Resonators. 2018 IEEE 13th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS). Available: http://dx.doi.org/10.1109/nems.2018.8557020.
dc.identifier.doi10.1109/nems.2018.8557020
dc.identifier.urihttp://hdl.handle.net/10754/630708
dc.description.abstractThis paper presents a study of the quality factor dependence on the geometrical parameters of in-plane clamped-clamped micro- and nano-beams capacitive structures at low-to-high pressure range. We found that smaller length and larger beam thickness maximize the quality factor. To minimize squeeze film damping, the structures have been fabricated with large capacitive air gaps. Despite the high ratio of the gap/thickness, we report significant effect of the gap width on the quality factor. It is found that, for micro-beams, this effect is limited at low pressure while for nano-beams, it continues until high pressure range. The geometry and the air gap effects on the damping of beams resonators have been examined experimentally. A finite-element study of the effect of the capacitive gap for in-plane resonators of one and two-side electrodes is presented. It is found that the presence of the double electrodes for in-plane resonators can cause significant drop of the quality factor compared to the single-sided beam resonator.
dc.description.sponsorshipWe gratefully acknowledge KAUST for funding this project.
dc.publisherInstitute of Electrical and Electronics Engineers (IEEE)
dc.relation.urlhttps://ieeexplore.ieee.org/document/8557020
dc.subjectIn-plane clamped-clamped MEMS/NEMS resonators
dc.subjectQuality factor
dc.subjectAir damping
dc.subjectMeasurements and Finite element analysis
dc.titleIn-Plane Air Damping of NEMS and MEMS Resonators
dc.typeConference Paper
dc.contributor.departmentMechanical Engineering Program
dc.contributor.departmentNano/Micro Mechanics and Motion Laboratory, King Abdullah University of Science and Technology, Thuwal, 23955-6900, Kingdom of Saudi Arabia
dc.contributor.departmentPhysical Science and Engineering (PSE) Division
dc.identifier.journal2018 IEEE 13th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)
kaust.personAlcheikh, Nouha
kaust.personKosuru, Lakshmoji
kaust.personKazmi, Syed
kaust.personYounis, Mohammad I.
dc.date.published-online2018-12-13
dc.date.published-print2018-04


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