On the response of MEMS resonators under generic electrostatic loadings: experiments and applications

Ilyas, Saad; Alfosail, Feras; Bellaredj, Mohamed L. F.; Younis, Mohammad I.

On the response of MEMS resonators under generic electrostatic loadings: experiments and applications

Files

On the Response of MEMS Resonators.pdf (1.3 MB)

Type

Article

Authors

Ilyas, Saad

Alfosail, Feras

Bellaredj, Mohamed L. F.
Younis, Mohammad I.

KAUST Department

Mechanical Engineering Program
Physical Science and Engineering (PSE) Division

KAUST Grant Number

OSR-2016-CRG5-3001

Online Publication Date

2018-12-15

Print Publication Date

2019-02

Date

2018-12-15

Abstract

We present an investigation of the dynamic behavior of an electrostatically actuated clamped–clamped microbeam, under the simultaneous excitation of primary and subharmonic resonance. The simultaneous excitation of primary and subharmonic resonances of similar strength is experimentally investigated by using different combinations of AC and DC voltages. It is observed that the response of the resonator is governed by a mixed effect of both excitations. Subharmonic-dominated response shows sharp amplitude transitions and smaller monostable regime, while primary-dominated response shows gradual amplitude transition and larger monostable regime. Two potential applications are experimentally demonstrated. The first is a resonator-based MEMS AND logic gate based on AC only subharmonic excitation. The second is a charge sensor based on the transition from subharmonic-dominated response to primary-dominated response, which is potentially capable of detecting a small amount of electric charges.

Citation

Ilyas S, Alfosail FK, Bellaredj MLF, Younis MI (2018) On the response of MEMS resonators under generic electrostatic loadings: experiments and applications. Nonlinear Dynamics. Available: http://dx.doi.org/10.1007/s11071-018-4690-3.

Acknowledgements

This publication is based upon work supported by the King Abdullah University of Science and Technology (KAUST) office of sponsored research OSR under Award No. OSR-2016-CRG5-3001.