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dc.contributor.authorIlyas, Saad
dc.contributor.authorAlfosail, Feras
dc.contributor.authorBellaredj, Mohamed L. F.
dc.contributor.authorYounis, Mohammad I.
dc.date.accessioned2018-12-23T08:15:49Z
dc.date.available2018-12-23T08:15:49Z
dc.date.issued2018-12-15
dc.identifier.citationIlyas S, Alfosail FK, Bellaredj MLF, Younis MI (2018) On the response of MEMS resonators under generic electrostatic loadings: experiments and applications. Nonlinear Dynamics. Available: http://dx.doi.org/10.1007/s11071-018-4690-3.
dc.identifier.issn0924-090X
dc.identifier.issn1573-269X
dc.identifier.doi10.1007/s11071-018-4690-3
dc.identifier.urihttp://hdl.handle.net/10754/630348
dc.description.abstractWe present an investigation of the dynamic behavior of an electrostatically actuated clamped–clamped microbeam, under the simultaneous excitation of primary and subharmonic resonance. The simultaneous excitation of primary and subharmonic resonances of similar strength is experimentally investigated by using different combinations of AC and DC voltages. It is observed that the response of the resonator is governed by a mixed effect of both excitations. Subharmonic-dominated response shows sharp amplitude transitions and smaller monostable regime, while primary-dominated response shows gradual amplitude transition and larger monostable regime. Two potential applications are experimentally demonstrated. The first is a resonator-based MEMS AND logic gate based on AC only subharmonic excitation. The second is a charge sensor based on the transition from subharmonic-dominated response to primary-dominated response, which is potentially capable of detecting a small amount of electric charges.
dc.description.sponsorshipThis publication is based upon work supported by the King Abdullah University of Science and Technology (KAUST) office of sponsored research OSR under Award No. OSR-2016-CRG5-3001.
dc.publisherSpringer Nature
dc.relation.urlhttps://link.springer.com/article/10.1007%2Fs11071-018-4690-3
dc.rightsThe final publication is available at Springer via http://dx.doi.org/10.1007/s11071-018-4690-3
dc.subjectClamped–clamped microbeam
dc.subjectMEMS logic device
dc.subjectMEMS electrometer
dc.subjectPrimary resonance excitation
dc.subjectSubharmonic resonance excitation
dc.titleOn the response of MEMS resonators under generic electrostatic loadings: experiments and applications
dc.typeArticle
dc.contributor.departmentMechanical Engineering Program
dc.contributor.departmentPhysical Science and Engineering (PSE) Division
dc.identifier.journalNonlinear Dynamics
dc.eprint.versionPost-print
kaust.personIlyas, Saad
kaust.personAlfosail, Feras
kaust.personBellaredj, Mohamed L. F.
kaust.personYounis, Mohammad I.
kaust.grant.numberOSR-2016-CRG5-3001
refterms.dateFOA2018-12-23T08:19:01Z
dc.date.published-online2018-12-15
dc.date.published-print2019-02


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