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    On the response of MEMS resonators under generic electrostatic loadings: experiments and applications

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    On the Response of MEMS Resonators.pdf
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    Type
    Article
    Authors
    Ilyas, Saad cc
    Alfosail, Feras cc
    Bellaredj, Mohamed L. F.
    Younis, Mohammad I. cc
    KAUST Department
    Mechanical Engineering Program
    Physical Science and Engineering (PSE) Division
    KAUST Grant Number
    OSR-2016-CRG5-3001
    Date
    2018-12-15
    Online Publication Date
    2018-12-15
    Print Publication Date
    2019-02
    Permanent link to this record
    http://hdl.handle.net/10754/630348
    
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    Abstract
    We present an investigation of the dynamic behavior of an electrostatically actuated clamped–clamped microbeam, under the simultaneous excitation of primary and subharmonic resonance. The simultaneous excitation of primary and subharmonic resonances of similar strength is experimentally investigated by using different combinations of AC and DC voltages. It is observed that the response of the resonator is governed by a mixed effect of both excitations. Subharmonic-dominated response shows sharp amplitude transitions and smaller monostable regime, while primary-dominated response shows gradual amplitude transition and larger monostable regime. Two potential applications are experimentally demonstrated. The first is a resonator-based MEMS AND logic gate based on AC only subharmonic excitation. The second is a charge sensor based on the transition from subharmonic-dominated response to primary-dominated response, which is potentially capable of detecting a small amount of electric charges.
    Citation
    Ilyas S, Alfosail FK, Bellaredj MLF, Younis MI (2018) On the response of MEMS resonators under generic electrostatic loadings: experiments and applications. Nonlinear Dynamics. Available: http://dx.doi.org/10.1007/s11071-018-4690-3.
    Sponsors
    This publication is based upon work supported by the King Abdullah University of Science and Technology (KAUST) office of sponsored research OSR under Award No. OSR-2016-CRG5-3001.
    Publisher
    Springer Nature
    Journal
    Nonlinear Dynamics
    DOI
    10.1007/s11071-018-4690-3
    Additional Links
    https://link.springer.com/article/10.1007%2Fs11071-018-4690-3
    ae974a485f413a2113503eed53cd6c53
    10.1007/s11071-018-4690-3
    Scopus Count
    Collections
    Articles; Physical Science and Engineering (PSE) Division; Mechanical Engineering Program

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