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    An Integrated Micro-chip with Ru/Al 2 O 3 /ZnO as Sensing Material for SO 2 Detection

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    Type
    Article
    Authors
    Liu, Yingying
    Xu, Xinyue
    Chen, Ying
    Zhang, Yuan
    Gao, Xinghua
    Xu, Pengcheng
    Li, Xinxin
    Fang, Jianhui
    Wen, Weijia
    Date
    2018-01-31
    Online Publication Date
    2018-01-31
    Print Publication Date
    2018-06
    Permanent link to this record
    http://hdl.handle.net/10754/629734
    
    Metadata
    Show full item record
    Abstract
    SO2 sensor is highly demanded in the application fields such as environmental protection and food manufactory. Herein, an integrated microsensor is developed for SO2 gas detection. For the fabrication of microsensor, ZnO nanosheets sensing material is firstly loaded onto the sensing area of the microsensor by using inkjet printing technology. Then, Al2O3 loaded with Ru nanoparticles (Ru/Al2O3) as catalyst are locally deposited onto the surface of ZnO nanosheets layer. Gas sensing performance measurements indicate that the fabricated microsensor exhibits a selective response to SO2, and a good linear relationship in the range of 5 to 115 ppm SO2 gases. Besides, this integrated microsensor has short response and recovery time. On-line mass spectrometry (on-line MS) experiment further reveals the formation of sulfur monoxide (SOradical dot) radical as an intermediate product for SO2 sensing. During the sensing process, Ru/Al2O3 as catalyst layer brings SO2 molecules to be broken down into easily detectable species (i.e. SOradical dot), and then ZnO nanosheets with abundant gas transport channels capture the produced SO generating output signals. Therefore, this kind of sensing material configuration exploits the advantage of each element, and makes it possible for trace and selective detection of SO2 gas.
    Citation
    Liu Y, Xu X, Chen Y, Zhang Y, Gao X, et al. (2018) An integrated micro-chip with Ru/Al 2 O 3 /ZnO as sensing material for SO 2 detection. Sensors and Actuators B: Chemical 262: 26–34. Available: http://dx.doi.org/10.1016/j.snb.2018.01.156.
    Sponsors
    This research is supported by MOST of China (2016YFA0200800), Natural Science Foundation of China (61527818, 61604163, 91323304, 61571430, 61321492) and Natural Science Foundation of Shanghai (17ZR1410000). P.C. X appreciates the financial support of the Youth Innovation Promotion Association CAS (2016213). Weijia Wen is the director of Joint KAUST-HKUST Micro/Nano-Fluidics Laboratory.
    Publisher
    Elsevier BV
    Journal
    Sensors and Actuators B: Chemical
    DOI
    10.1016/j.snb.2018.01.156
    ae974a485f413a2113503eed53cd6c53
    10.1016/j.snb.2018.01.156
    Scopus Count
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