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dc.contributor.authorZidan, Mohammed A.
dc.contributor.authorKosel, Jürgen
dc.contributor.authorSalama, Khaled N.
dc.date.accessioned2018-11-07T08:28:23Z
dc.date.available2018-11-07T08:28:23Z
dc.date.issued2018-06-21
dc.date.submitted2016-06-14
dc.identifier.urihttp://hdl.handle.net/10754/629635
dc.description.abstractA microelectromechanical system (MEMS) switch with liquid dielectric and a method of fabrication thereof are provided. In the context of the MEMS switch, a MEMS switch is provided including a cantilevered source switch, a first actuation gate disposed parallel to the cantilevered source switch, a first drain disposed parallel to a movable end of the cantilevered source switch, and a liquid dielectric disposed within a housing of the microelectromechanical system switch.
dc.relation.urlhttps://patents.google.com/patent/US20180174788A1/en
dc.titleLiquid Dielectric Electrostatic Mems Switch And Method Of Fabrication Thereof
dc.typePatent
dc.contributor.departmentComputer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division
dc.contributor.departmentElectrical Engineering Program
dc.contributor.departmentPhysical Science and Engineering (PSE) Division
dc.contributor.departmentSensing, Magnetism and Microsystems Lab
dc.contributor.departmentSensors Lab
dc.description.statusPublished Application
kaust.personZidan, Mohammed A.
kaust.personKosel, Jürgen
kaust.personSalama, Khaled N.
dc.contributor.assigneeKing Abdullah University Of Science And Technology
dc.identifier.applicationnumberUS20180174788A1
dc.identifier.applicationnumberWO2016203369A1
refterms.dateFOA2018-11-07T08:28:29Z


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