Reduction and Increase in Thermal Conductivity of Si Irradiated with Ga+ via Focused Ion Beam
Ghasemi Baboly, Mohammadhosein
Jiang, Ying Bing
Rempe, Susan B.
Anjum, Dalaver H.
Donovan, Brian Francis
Szwejkowski, Chester J
Gaskins, John Thomas
Braun, Jeffrey L.
Hopkins, Patrick E.
Leseman, Zayd Chad
KAUST DepartmentBiological and Environmental Sciences and Engineering (BESE) Division
Nanofabrication Core Lab
Office of the VP
Physical Sciences and Engineering (PSE) Division
Online Publication Date2018-10-03
Print Publication Date2018-10-31
Permanent link to this recordhttp://hdl.handle.net/10754/628917
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AbstractFocused Ion Beam (FIB) technology has become a valuable tool for the microelectronics industry and for the fabrication and preparation of samples at the micro/nanoscale. Its effects on the thermal transport properties of Si, however are not well understood, nor do experimental data exist. This paper presents a carefully designed set of experiments for the determination of the thermal conductivity of Si samples irradiated by Ga+ FIB. Generally, the thermal conductivity decreases with increasing ion dose. For doses of >1016 (Ga+/cm2), a reversal of the trend was observed due to recrystallization of Si. This report provides insight on the thermal transport considerations relevant to engineering of Si nanostructures and interfaces fabricated or prepared by FIB.
CitationAlaie S, Ghasemi Baboly M, Jiang YB, Rempe SB, Anjum DH, et al. (2018) Reduction and Increase in Thermal Conductivity of Si Irradiated with Ga+ via Focused Ion Beam. ACS Applied Materials & Interfaces. Available: http://dx.doi.org/10.1021/acsami.8b11949.
SponsorsSA, MGB, DFG and ZCL acknowledge support from the National Science Foundation Division of CMMI under Award 1056077. Materials supplied by PEH et al. are based upon work partially supported by the Air Force Office of Scientific Research under award number FA9550-18-1-0352. PEH is also appreciative for support from the National Science Foundation, Grant No. CBET-1706388.
PublisherAmerican Chemical Society (ACS)