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dc.contributor.authorHajjaj, Amal
dc.contributor.authorJaber, Nizar
dc.contributor.authorHafiz, Md Abdullah Al
dc.contributor.authorIlyas, Saad
dc.contributor.authorYounis, Mohammad I.
dc.date.accessioned2018-10-07T08:32:25Z
dc.date.available2018-10-07T08:32:25Z
dc.date.issued2018-10-03
dc.identifier.citationHajjaj AZ, Jaber N, Hafiz MAA, Ilyas S, Younis MI (2018) Multiple internal resonances in MEMS arch resonators. Physics Letters A. Available: http://dx.doi.org/10.1016/j.physleta.2018.09.033.
dc.identifier.issn0375-9601
dc.identifier.doi10.1016/j.physleta.2018.09.033
dc.identifier.urihttp://hdl.handle.net/10754/628881
dc.description.abstractMicromachined shallow arch resonant beams have attracted significant attention thanks to their rich dynamical behavior, inherent nonlinearities, and the potential to excite various internal resonances. Currently, there is a lack of comprehensive experimental studies for the various types of internal resonances in arches and particularly at the micro and nano scales. Here, we aim to investigate and identify different types of internal resonances of an initially curved beam, electrothermally actuated and electrostatically driven, by electrical characterization techniques. Upon changing the electrothermal voltage of silicon micromachined arches, the second symmetric natural frequency of an arch is adjusted to near twice, three times, and four times the fundamental natural frequency, which gives rise to 2:1, 3:1, and 4:1 autoparametric resonances between the two modes. These resonances are demonstrated experimentally. We show various frequency-response curves of the total response around the excitation frequency and highlight the contribution of each mode before, during, and after the internal resonances. Allan-deviation results are also shown indicating enhanced frequency stabilization of the arch oscillation when experiencing internal resonances. These studies motivate further research in this direction to exploit internal resonances of micromachined resonators for practical applications, such as sensors and mechanical amplifier.
dc.description.sponsorshipThis research has been supported through King Abdullah University of Science and Technology (KAUST) fund.
dc.publisherElsevier BV
dc.relation.urlhttps://www.sciencedirect.com/science/article/pii/S0375960118309939
dc.rightsNOTICE: this is the author’s version of a work that was accepted for publication in Physics Letters A. Changes resulting from the publishing process, such as peer review, editing, corrections, structural formatting, and other quality control mechanisms may not be reflected in this document. Changes may have been made to this work since it was submitted for publication. A definitive version was subsequently published in Physics Letters A, [, , (2018-10-03)] DOI: 10.1016/j.physleta.2018.09.033 . © 2018. This manuscript version is made available under the CC-BY-NC-ND 4.0 license http://creativecommons.org/licenses/by-nc-nd/4.0/
dc.subjectMicromachined arch resonator
dc.subjectNonlinearity
dc.subjectInternal resonance
dc.subjectElectrothermal and electrostatic actuation
dc.titleMultiple internal resonances in MEMS arch resonators
dc.typeArticle
dc.contributor.departmentComputer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division
dc.contributor.departmentMechanical Engineering Program
dc.contributor.departmentPhysical Science and Engineering (PSE) Division
dc.identifier.journalPhysics Letters A
dc.eprint.versionPost-print
kaust.personHajjaj, Amal Z.
kaust.personJaber, Nizar
kaust.personHafiz, Md Abdullah Al
kaust.personIlyas, Saad
kaust.personYounis, Mohammad I.
refterms.dateFOA2018-10-07T08:45:02Z
dc.date.published-online2018-10-03
dc.date.published-print2018-11


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