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dc.contributor.authorPisani, Marco
dc.contributor.authorGiugni, Andrea
dc.date.accessioned2018-09-03T13:23:25Z
dc.date.available2018-09-03T13:23:25Z
dc.date.issued2018-06-29
dc.identifier.citationPisani M, Giugni A (2018) A portable picometer reference actuator with 100 µm range, picometer resolution, subnanometer accuracy and submicroradian tip-tilt error for the characterization of measuring instruments at the nanoscale. Metrologia 55: 541–557. Available: http://dx.doi.org/10.1088/1681-7575/aaca6f.
dc.identifier.issn0026-1394
dc.identifier.issn1681-7575
dc.identifier.doi10.1088/1681-7575/aaca6f
dc.identifier.urihttp://hdl.handle.net/10754/628434
dc.description.abstractWe present the realization and the characterization of a picometer reference actuator (PRA), a metrological instrument based on a precision linear actuator capable of 100 µm range with subnanometer accuracy, picometer resolution, and submicroradian tip-tilt pointing control. The PRA relies on an integrated multiple reflections homodyne interferometer as a high resolution and accurate internal reference, on a multiple reflection based angle sensor for the control of the movement straightness, and on a versatile mirrors configuration to transfer the metrological traceability to an external device. As an example case we report the use of the PRA for the characterization of the non-linearities of the INRIM heterodyne interferometer dedicated to the calibration of capacitive sensors.
dc.description.sponsorshipThe authors wish to thank their colleague Marco Santiano for his valuable technical support, their colleagues Nicola Bancone, Massimo Zucco and Milena Astrua for their support in software development and their colleague Gian Bartolo Picotto for the realization of the heterodyne interferometer used in the comparison. The research leading to the results presented here has received funding from the European Community's Seventh Framework Programme, ERA-NET Plus, under grant agreement no 217257.
dc.publisherIOP Publishing
dc.relation.urlhttp://iopscience.iop.org/article/10.1088/1681-7575/aaca6f/meta
dc.rightsOriginal content from this work may be used under the terms of the Creative Commons Attribution 3.0 licence. Any further distribution of this work must maintain attribution to the author(s) and the title of the work, journal citation and DOI.
dc.rights.urihttp://creativecommons.org/licenses/by/3.0
dc.titleA portable Picometer Reference Actuator with 100 um range, picometer resolution, subnanometer accuracy and submicroradian tip-tilt error for the characterization of measuring instruments at the nanoscale
dc.typeArticle
dc.contributor.departmentPhysical Science and Engineering (PSE) Division
dc.identifier.journalMetrologia
dc.eprint.versionPublisher's Version/PDF
dc.contributor.institutionIstituto Nazionale di Ricerca Metrologica (INRIM), Strada delle Cacce 91, 10135 Torino, Italy
kaust.personGiugni, Andrea
refterms.dateFOA2018-09-09T13:05:18Z
dc.date.published-online2018-06-29
dc.date.published-print2018-08-01


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Original content from this work may be used under the terms of the Creative Commons Attribution 3.0 licence. Any further distribution of this work must maintain attribution to the author(s) and the title of the work, journal citation and DOI.
Except where otherwise noted, this item's license is described as Original content from this work may be used under the terms of the Creative Commons Attribution 3.0 licence. Any further distribution of this work must maintain attribution to the author(s) and the title of the work, journal citation and DOI.