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    Using Mosaicity to Tune Thermal Transport in Polycrystalline AlN Thin Films

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    Type
    Article
    Authors
    Singh, Shivkant
    Shervin, Shahab
    Sun, Haiding cc
    Yarali, Milad
    Chen, Jie
    Lin, Ronghui cc
    Li, Kuang-Hui
    Li, Xiaohang cc
    Ryou, Jae-Hyun
    Mavrokefalos, Anastassios
    KAUST Department
    Advanced Semiconductor Laboratory
    Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division
    Electrical Engineering Program
    Material Science and Engineering Program
    Physical Science and Engineering (PSE) Division
    Date
    2018-05-17
    Online Publication Date
    2018-05-17
    Print Publication Date
    2018-06-13
    Permanent link to this record
    http://hdl.handle.net/10754/627942
    
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    Abstract
    The effect of controlling the c-axis alignment (mosaicity) to the cross-plane thermal transport in textured polycrystalline aluminum nitride (AlN) thin films is experimentally and theoretically investigated. We show that by controlling the sputtering conditions we are able to deposit AlN thin films with varying c-axis grain tilt (mosaicity) from 10° to 0°. Microstructural characterization shows that the films are nearly identical in thickness and grain size, and the difference in mosaicity alters the grain interface quality. This has a significant effect to thermal transport where a thermal conductivity of 4.22 W/mK vs. 8.09 W/mK are measured for samples with tilt angles of 10° vs. 0° respectively. The modified Callaway model was used to fit the theoretical curves to the experimental results using various phonon scattering mechanisms at the grain interface. It was found that using a non-gray model gives an overview of the phonon scattering at the grain boundaries, whereas treating the grain boundary as an array of dislocation lines with varying angle relative to the heat flow, best describes the mechanism of the thermal transport. Lastly, our results show that controlling the quality of the grain interface provides a tuning knob to control thermal transport in polycrystalline materials.
    Citation
    Singh S, Shervin S, Sun H, Yarali M, Chen J, et al. (2018) Using Mosaicity to Tune Thermal Transport in Polycrystalline AlN Thin Films. ACS Applied Materials & Interfaces. Available: http://dx.doi.org/10.1021/acsami.8b02899.
    Sponsors
    A. M. acknowledges financial support from the University of Houston. J.H.R. acknowledges partial support from the Texas Center for Superconductivity at the University of Houston (TcSUH).
    Publisher
    American Chemical Society (ACS)
    Journal
    ACS Applied Materials & Interfaces
    DOI
    10.1021/acsami.8b02899
    Additional Links
    https://pubs.acs.org/doi/10.1021/acsami.8b02899
    ae974a485f413a2113503eed53cd6c53
    10.1021/acsami.8b02899
    Scopus Count
    Collections
    Articles; Physical Science and Engineering (PSE) Division; Electrical and Computer Engineering Program; Material Science and Engineering Program; Computer, Electrical and Mathematical Science and Engineering (CEMSE) Division

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