Impacts of doping on epitaxial germanium thin film quality and Si-Ge interdiffusion
Lee, Kwang Hong
Anjum, Dalaver H.
Tan, Chuan Seng
KAUST DepartmentPhysical Sciences and Engineering (PSE) Division
Materials Science and Engineering Program
Imaging and Characterization Core Lab
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AbstractGe-on-Si structures with three different dopants (P, As and B) and those without intentional doping were grown, annealed and characterized by several different material characterization methods. All samples have a smooth surface (roughness < 1.5 nm), and the Ge films are almost entirely relaxed. B doped Ge films have threading dislocations above 1 × 10 cm, while P and As doping can reduce the threading dislocation density to be less than 10 cm without annealing. The interdiffusion of Si and Ge of different films have been investigated experimentally and theoretically. A quantitative model of Si-Ge interdiffusion under extrinsic conditions across the full x range was established including the dislocationmediated diffusion. The Kirkendall effect has been observed. The results are of technical significance for the structure, doping, and process design of Ge-on-Si based devices, especially for photonic applications.
CitationZhou G, Lee KH, Anjum DH, Zhang Q, Zhang X, et al. (2018) Impacts of doping on epitaxial germanium thin film quality and Si-Ge interdiffusion. Optical Materials Express 8: 1117. Available: http://dx.doi.org/10.1364/OME.8.001117.
SponsorsNatural Science and Engineering Research Council of Canada (NSERC); National Research Foundation Singapore through the Singapore MIT Alliance for Research and Technology's Low Energy Electronic Systems (LEES) IRG, Competitive Research Program (NRF-CRP12-2013-04); Innovation Grant from SMART Innovation Centre.Dr. Mario Beaudoin from the Advanced Nanofabrication Facility at the University of British Columbia is acknowledged for the training in HRXRD and EPD measurements and helpful discussions.
PublisherThe Optical Society
JournalOptical Materials Express