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dc.contributor.authorMoussi, Khalil
dc.contributor.authorKosel, Jürgen
dc.date.accessioned2018-04-16T11:27:40Z
dc.date.available2018-04-16T11:27:40Z
dc.date.issued2018-04-11
dc.identifier.citationMoussi K, Kosel J (2018) 3-D Printed Biocompatible Micro-Bellows Membranes. Journal of Microelectromechanical Systems: 1–7. Available: http://dx.doi.org/10.1109/jmems.2018.2819994.
dc.identifier.issn1057-7157
dc.identifier.issn1941-0158
dc.identifier.doi10.1109/jmems.2018.2819994
dc.identifier.urihttp://hdl.handle.net/10754/627483
dc.description.abstractBellows membranes are essential elements in many actuator devices. Currently, the size, shape, and dimensions of bellows membranes are limited by the fabrication process constraints. Miniaturizing the bellows membranes is a prerequisite for the development of integrated systems with novel capabilities as needed, for example, in advanced biomedical devices. Using a two-photon polymerization, 3-D printing technique, we present a high-resolution, high-yield, and customizable manufacturing process to produce Parylene C micro-bellows. An optimization of the crucial design parameters is performed using finite element modeling from which designs with high deflection and low stress were obtained. Different micro-bellows designs are fabricated and characterized. The total volume of the fabricated models ranges from 3 to 0.3 mm³ and the minimum feature size is 60 μm. The achieved cumulative deflection ranges from 300 to 570 μm. [2017-0307]
dc.description.sponsorshipThis work was supported by the King Abdullah University of Science and Technology. Subject Editor A. Luque.
dc.publisherInstitute of Electrical and Electronics Engineers (IEEE)
dc.relation.urlhttps://ieeexplore.ieee.org/document/8335263/
dc.rights(c) 2018 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other users, including reprinting/ republishing this material for advertising or promotional purposes, creating new collective works for resale or redistribution to servers or lists, or reuse of any copyrighted components of this work in other works. Released under the IEEE Open Access Publishing Agreement.
dc.rights.urihttp://www.ieee.org/publications_standards/publications/rights/oa_author_choices.html
dc.subject3D printing
dc.subjectminiaturization
dc.subjectmicro-bellows membrane
dc.subjectmicrofabrication
dc.subjectmicro device
dc.subjectParylene C
dc.title3-D Printed Biocompatible Micro-Bellows Membranes
dc.typeArticle
dc.contributor.departmentComputer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division
dc.contributor.departmentElectrical Engineering Program
dc.identifier.journalJournal of Microelectromechanical Systems
dc.eprint.versionPublisher's Version/PDF
kaust.personMoussi, Khalil
kaust.personKosel, Jürgen
refterms.dateFOA2018-06-14T05:51:34Z
dc.date.published-online2018-04-11
dc.date.published-print2018-06


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