KAUST DepartmentComputer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division
Electrical Engineering Program
Online Publication Date2018-04-11
Print Publication Date2018-06
Permanent link to this recordhttp://hdl.handle.net/10754/627483
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AbstractBellows membranes are essential elements in many actuator devices. Currently, the size, shape, and dimensions of bellows membranes are limited by the fabrication process constraints. Miniaturizing the bellows membranes is a prerequisite for the development of integrated systems with novel capabilities as needed, for example, in advanced biomedical devices. Using a two-photon polymerization, 3-D printing technique, we present a high-resolution, high-yield, and customizable manufacturing process to produce Parylene C micro-bellows. An optimization of the crucial design parameters is performed using finite element modeling from which designs with high deflection and low stress were obtained. Different micro-bellows designs are fabricated and characterized. The total volume of the fabricated models ranges from 3 to 0.3 mm³ and the minimum feature size is 60 μm. The achieved cumulative deflection ranges from 300 to 570 μm. [2017-0307]
CitationMoussi K, Kosel J (2018) 3-D Printed Biocompatible Micro-Bellows Membranes. Journal of Microelectromechanical Systems: 1–7. Available: http://dx.doi.org/10.1109/jmems.2018.2819994.
SponsorsThis work was supported by the King Abdullah University of Science and Technology. Subject Editor A. Luque.