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dc.contributor.authorIlyas, Saad
dc.contributor.authorJaber, Nizar
dc.contributor.authorYounis, Mohammad I.
dc.date.accessioned2018-03-11T06:54:09Z
dc.date.available2018-03-11T06:54:09Z
dc.date.issued2018-02-03
dc.identifier.citationIlyas S, Jaber N, Younis MI (2018) A MEMS coupled resonator for frequency filtering in air. Mechatronics. Available: http://dx.doi.org/10.1016/j.mechatronics.2018.01.002.
dc.identifier.issn0957-4158
dc.identifier.doi10.1016/j.mechatronics.2018.01.002
dc.identifier.urihttp://hdl.handle.net/10754/627235
dc.description.abstractWe present design, fabrication, and characterization of a mechanically coupled MEMS H resonator capable of performing simultaneous mechanical amplification and filtering in air. The device comprises of two doubly clamped polyimide microbeams joined through the middle by a coupling beam of the same size. The resonator is fabricated via a multi-layer surface micromachining process. A special fabrication process and device design is employed to enable operation in air and to achieve mechanical amplification of the output response. Moreover, mixed-frequency excitation is used to demonstrate a tunable wide band filter for low frequency applications. It is demonstrated that through the multi-source harmonic excitation and the operation in air, an improved band-pass filter with flat response and minimal ripples can be achieved.
dc.description.sponsorshipThis research has been supported through King Abdullah University of Science and Technology (KAUST) fund.
dc.publisherElsevier BV
dc.relation.urlhttp://www.sciencedirect.com/science/article/pii/S0957415818300060
dc.subjectCoupled resonator
dc.subjectClamped–clamped beam
dc.subjectFilter
dc.subjectMixed-source excitation
dc.subjectSqueeze film damping
dc.subjectSurface micromachining
dc.titleA MEMS coupled resonator for frequency filtering in air
dc.typeArticle
dc.contributor.departmentMechanical Engineering Program
dc.contributor.departmentPhysical Science and Engineering (PSE) Division
dc.identifier.journalMechatronics
kaust.personIlyas, Saad
kaust.personJaber, Nizar
kaust.personYounis, Mohammad I.
dc.date.published-online2018-02-03
dc.date.published-print2018-02


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