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    Induction-heating MOCVD reactor with significantly improved heating efficiency and reduced harmful magnetic coupling

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    Type
    Article
    Authors
    Li, Kuang-Hui
    Alotaibi, Hamad S.
    Sun, Haiding cc
    Lin, Ronghui cc
    Guo, Wenzhe cc
    Torres-Castanedo, Carlos G.
    Liu, Kaikai cc
    Galan, Sergio V.
    Li, Xiaohang cc
    KAUST Department
    Advanced Semiconductor Laboratory
    Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division
    Electrical Engineering Program
    Material Science and Engineering Program
    Physical Science and Engineering (PSE) Division
    KAUST Grant Number
    BAS/1/1664-01-01
    Date
    2018-02-23
    Online Publication Date
    2018-02-23
    Print Publication Date
    2018-04
    Permanent link to this record
    http://hdl.handle.net/10754/627195
    
    Metadata
    Show full item record
    Abstract
    In a conventional induction-heating III-nitride metalorganic chemical vapor deposition (MOCVD) reactor, the induction coil is outside the chamber. Therefore, the magnetic field does not couple with the susceptor well, leading to compromised heating efficiency and harmful coupling with the gas inlet and thus possible overheating. Hence, the gas inlet has to be at a minimum distance away from the susceptor. Because of the elongated flow path, premature reactions can be more severe, particularly between Al- and B-containing precursors and NH3. Here, we propose a structure that can significantly improve the heating efficiency and allow the gas inlet to be closer to the susceptor. Specifically, the induction coil is designed to surround the vertical cylinder of a T-shaped susceptor comprising the cylinder and a top horizontal plate holding the wafer substrate within the reactor. Therefore, the cylinder coupled most magnetic field to serve as the thermal source for the plate. Furthermore, the plate can block and thus significantly reduce the uncoupled magnetic field above the susceptor, thereby allowing the gas inlet to be closer. The results show approximately 140% and 2.6 times increase in the heating and susceptor coupling efficiencies, respectively, as well as a 90% reduction in the harmful magnetic flux on the gas inlet.
    Citation
    Li K-H, Alotaibi HS, Sun H, Lin R, Guo W, et al. (2018) Induction-heating MOCVD reactor with significantly improved heating efficiency and reduced harmful magnetic coupling. Journal of Crystal Growth. Available: http://dx.doi.org/10.1016/j.jcrysgro.2018.02.031.
    Sponsors
    Because of competition and the resulting confidentiality, there is little information on induction-heating MOCVD reactor design available in print and on the internet. We thus appreciate the following people who have generously provided suggestions and advice: Dr. G. Tompa and the engineers at Structured Materials Industries, Dr. K. Balakrishnan at BRIDGE, Dr. J. Creighton at Sandia National Laboratories, Prof. Z. Sitar and Prof. R. Collazo at North Carolina State University, Dr. A. Paranjpe at Veeco Instruments, Mr. J. Schmitt at Nitride Solution, Dr. A. Boyd at AIXTRON, and Prof. S. Novikov at the University of Nottingham. This research was sponsored by the KAUST Baseline Fund BAS/1/1664-01-01 and Equipment Fund BAS/1/1664-01-07.
    Publisher
    Elsevier BV
    Journal
    Journal of Crystal Growth
    DOI
    10.1016/j.jcrysgro.2018.02.031
    Additional Links
    http://www.sciencedirect.com/science/article/pii/S0022024818300848
    ae974a485f413a2113503eed53cd6c53
    10.1016/j.jcrysgro.2018.02.031
    Scopus Count
    Collections
    Articles; Physical Science and Engineering (PSE) Division; Electrical and Computer Engineering Program; Material Science and Engineering Program; Computer, Electrical and Mathematical Science and Engineering (CEMSE) Division

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