Induction-heating MOCVD reactor with significantly improved heating efficiency and reduced harmful magnetic coupling
Type
ArticleAuthors
Li, Kuang-HuiAlotaibi, Hamad S.
Sun, Haiding
Lin, Ronghui
Guo, Wenzhe
Torres-Castanedo, Carlos G.
Liu, Kaikai
Galan, Sergio V.
Li, Xiaohang
KAUST Department
Advanced Semiconductor LaboratoryComputer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division
Electrical Engineering Program
Material Science and Engineering Program
Physical Science and Engineering (PSE) Division