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    Smart Resonant Gas Sensor and Switch Operating in Air With Metal-Organic Frameworks Coating

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    Type
    Conference Paper
    Authors
    Jaber, Nizar cc
    Ilyas, Saad cc
    Shekhah, Osama cc
    Eddaoudi, Mohamed cc
    Younis, Mohammad I. cc
    KAUST Department
    Advanced Membranes and Porous Materials Research Center
    Chemical Science Program
    Functional Materials Design, Discovery and Development (FMD3)
    Mechanical Engineering Program
    Physical Science and Engineering (PSE) Division
    Date
    2017-11-03
    Online Publication Date
    2017-11-03
    Print Publication Date
    2017-08-06
    Permanent link to this record
    http://hdl.handle.net/10754/626796
    
    Metadata
    Show full item record
    Abstract
    We report a resonant gas sensor, uniformly coated with a metal-organic framework (MOF), and excited it near the higher order modes for a higher attained sensitivity. Also, switching upon exceeding a threshold value is demonstrated by operating the resonator near the bifurcation point and the dynamic pull-in instabilities. The resonator is based on an electrostatically excited clamped-clamped microbeam. The microbeam is fabricated from a polyimide layer coated from the top with Cr/Au and from the bottom with Cr/Au/Cr layer. The geometry of the resonator is optimized to reduce the effect of squeeze film damping, thereby allowing operation under atmospheric pressure. The electrostatic electrode is designed to enhance the excitation of the second mode of vibration with the minimum power required. Significant frequency shift (kHz) is demonstrated for the first time upon water vapor, acetone, and ethanol exposure due to the MOF functionalization and the higher order modes excitation. Also, the adsorption dynamics and MOF selectivity is investigated by studying the decaying time constants of the response upon gas exposure.
    Citation
    Jaber NR, Ilyas S, Shekhah O, Eddaoudi M, Younis MI (2017) Smart Resonant Gas Sensor and Switch Operating in Air With Metal-Organic Frameworks Coating. Volume 4: 22nd Design for Manufacturing and the Life Cycle Conference; 11th International Conference on Micro- and Nanosystems. Available: http://dx.doi.org/10.1115/DETC2017-67823.
    Publisher
    ASME International
    Journal
    Volume 4: 22nd Design for Manufacturing and the Life Cycle Conference; 11th International Conference on Micro- and Nanosystems
    Conference/Event name
    ASME 2017 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE 2017
    DOI
    10.1115/DETC2017-67823
    Additional Links
    http://proceedings.asmedigitalcollection.asme.org/proceeding.aspx?articleid=2662158
    ae974a485f413a2113503eed53cd6c53
    10.1115/DETC2017-67823
    Scopus Count
    Collections
    Conference Papers; Advanced Membranes and Porous Materials Research Center; Physical Science and Engineering (PSE) Division; Functional Materials Design, Discovery and Development (FMD3); Chemical Science Program; Mechanical Engineering Program

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