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dc.contributor.authorIlyas, Saad
dc.contributor.authorJaber, Nizar
dc.contributor.authorYounis, Mohammad I.
dc.date.accessioned2018-01-15T06:35:09Z
dc.date.available2018-01-15T06:35:09Z
dc.date.issued2017-11-03
dc.identifier.citationIlyas S, Jaber N, Younis MI (2017) MEMS Coupled Resonator for Filter Application in Air. Volume 4: 22nd Design for Manufacturing and the Life Cycle Conference; 11th International Conference on Micro- and Nanosystems. Available: http://dx.doi.org/10.1115/DETC2017-67875.
dc.identifier.doi10.1115/DETC2017-67875
dc.identifier.urihttp://hdl.handle.net/10754/626793
dc.description.abstractWe present a mechanically coupled MEMS H resonator capable of performing simultaneous amplification and filter operation in air. The device comprises of two doubly clamped polyimide microbeams joined through the middle by a coupling beam of the same size. The resonator is fabricated via a multilayer surface micromachining process. A special fabrication process and device design is employed to enable the device's operation in air and to achieve mechanical amplification of the output response. Moreover, mixed-frequency excitation is used to demonstrate a tunable wide band filter. The device design combined with the mixed-frequency excitation is used to demonstrate simultaneous amplification and filtering in air.
dc.description.sponsorshipThis work has been supported through King Abdullah University of Science and Technology (KAUST) research funds.
dc.publisherASME International
dc.relation.urlhttp://proceedings.asmedigitalcollection.asme.org/proceeding.aspx?articleid=2662169
dc.titleMEMS Coupled Resonator for Filter Application in Air
dc.typeConference Paper
dc.contributor.departmentMechanical Engineering Program
dc.contributor.departmentPhysical Science and Engineering (PSE) Division
dc.identifier.journalVolume 4: 22nd Design for Manufacturing and the Life Cycle Conference; 11th International Conference on Micro- and Nanosystems
dc.conference.date2017-08-06 to 2017-08-09
dc.conference.nameASME 2017 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE 2017
dc.conference.locationCleveland, OH, USA
kaust.personIlyas, Saad
kaust.personJaber, Nizar
kaust.personYounis, Mohammad I.
dc.date.published-online2017-11-03
dc.date.published-print2017-08-06


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