Type
Conference PaperDate
2017-11-03Online Publication Date
2017-11-03Print Publication Date
2017-08-06Permanent link to this record
http://hdl.handle.net/10754/626793
Metadata
Show full item recordAbstract
We present a mechanically coupled MEMS H resonator capable of performing simultaneous amplification and filter operation in air. The device comprises of two doubly clamped polyimide microbeams joined through the middle by a coupling beam of the same size. The resonator is fabricated via a multilayer surface micromachining process. A special fabrication process and device design is employed to enable the device's operation in air and to achieve mechanical amplification of the output response. Moreover, mixed-frequency excitation is used to demonstrate a tunable wide band filter. The device design combined with the mixed-frequency excitation is used to demonstrate simultaneous amplification and filtering in air.Citation
Ilyas S, Jaber N, Younis MI (2017) MEMS Coupled Resonator for Filter Application in Air. Volume 4: 22nd Design for Manufacturing and the Life Cycle Conference; 11th International Conference on Micro- and Nanosystems. Available: http://dx.doi.org/10.1115/DETC2017-67875.Sponsors
This work has been supported through King Abdullah University of Science and Technology (KAUST) research funds.Publisher
ASME InternationalConference/Event name
ASME 2017 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE 2017Additional Links
http://proceedings.asmedigitalcollection.asme.org/proceeding.aspx?articleid=2662169ae974a485f413a2113503eed53cd6c53
10.1115/DETC2017-67875