Online Publication Date2017-11-03
Print Publication Date2017-08-06
Permanent link to this recordhttp://hdl.handle.net/10754/626793
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AbstractWe present a mechanically coupled MEMS H resonator capable of performing simultaneous amplification and filter operation in air. The device comprises of two doubly clamped polyimide microbeams joined through the middle by a coupling beam of the same size. The resonator is fabricated via a multilayer surface micromachining process. A special fabrication process and device design is employed to enable the device's operation in air and to achieve mechanical amplification of the output response. Moreover, mixed-frequency excitation is used to demonstrate a tunable wide band filter. The device design combined with the mixed-frequency excitation is used to demonstrate simultaneous amplification and filtering in air.
CitationIlyas S, Jaber N, Younis MI (2017) MEMS Coupled Resonator for Filter Application in Air. Volume 4: 22nd Design for Manufacturing and the Life Cycle Conference; 11th International Conference on Micro- and Nanosystems. Available: http://dx.doi.org/10.1115/DETC2017-67875.
SponsorsThis work has been supported through King Abdullah University of Science and Technology (KAUST) research funds.
JournalVolume 4: 22nd Design for Manufacturing and the Life Cycle Conference; 11th International Conference on Micro- and Nanosystems
Conference/Event nameASME 2017 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE 2017