Axially Modulated Clamped-Guided Arch Resonator for Memory and Logic Applications
AuthorsHafiz, Md Abdullah Al
Tella, Sherif Adekunle
Younis, Mohammad I.
KAUST DepartmentPhysical Sciences and Engineering (PSE) Division
Mechanical Engineering Program
Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division
Electrical Engineering Program
Permanent link to this recordhttp://hdl.handle.net/10754/626779
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AbstractWe experimentally demonstrate memory and logic devices based on an axially modulated clamped-guided arch resonator. The device are electrostatically actuated and capacitively sensed, while the resonance frequency modulation is achieved through an axial electrostatic force from the guided side of the clamped-guided arch microbeam. We present two case studies: first, a dynamic memory based on the nonlinear frequency response of the resonator, and second, a reprogrammable two-input logic gate based on the linear frequency modulation of the resonator. These devices show energy cost per memory/logic operation in pJ, are fully compatible with CMOS fabrication processes, have the potential for on-chip system integration, and operate at room temperature.
CitationHafiz MAA, Tella S, Alcheikh N, Fariborzi H, Younis MI (2017) Axially Modulated Clamped-Guided Arch Resonator for Memory and Logic Applications. Volume 4: 22nd Design for Manufacturing and the Life Cycle Conference; 11th International Conference on Micro- and Nanosystems. Available: http://dx.doi.org/10.1115/detc2017-68284.
JournalVolume 4: 22nd Design for Manufacturing and the Life Cycle Conference; 11th International Conference on Micro- and Nanosystems
Conference/Event nameASME 2017 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE 2017