Axially Modulated Clamped-Guided Arch Resonator for Memory and Logic Applications
Type
Conference PaperAuthors
Hafiz, Md Abdullah Al
Tella, Sherif Adekunle

Alcheikh, Nouha

Fariborzi, Hossein

Younis, Mohammad I.

KAUST Department
Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) DivisionElectrical Engineering Program
Mechanical Engineering Program
Physical Science and Engineering (PSE) Division
Date
2017-11-03Online Publication Date
2017-11-03Print Publication Date
2017-08-06Permanent link to this record
http://hdl.handle.net/10754/626779
Metadata
Show full item recordAbstract
We experimentally demonstrate memory and logic devices based on an axially modulated clamped-guided arch resonator. The device are electrostatically actuated and capacitively sensed, while the resonance frequency modulation is achieved through an axial electrostatic force from the guided side of the clamped-guided arch microbeam. We present two case studies: first, a dynamic memory based on the nonlinear frequency response of the resonator, and second, a reprogrammable two-input logic gate based on the linear frequency modulation of the resonator. These devices show energy cost per memory/logic operation in pJ, are fully compatible with CMOS fabrication processes, have the potential for on-chip system integration, and operate at room temperature.Citation
Hafiz MAA, Tella S, Alcheikh N, Fariborzi H, Younis MI (2017) Axially Modulated Clamped-Guided Arch Resonator for Memory and Logic Applications. Volume 4: 22nd Design for Manufacturing and the Life Cycle Conference; 11th International Conference on Micro- and Nanosystems. Available: http://dx.doi.org/10.1115/detc2017-68284.Publisher
ASME InternationalConference/Event name
ASME 2017 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE 2017Additional Links
http://proceedings.asmedigitalcollection.asme.org/proceeding.aspx?articleid=2662164ae974a485f413a2113503eed53cd6c53
10.1115/detc2017-68284