An Electrically Actuated Microbeam-Based MEMS Device: Experimental and Theoretical Investigation
Bellaredj, Mohammed Lamine Faycal
Younis, Mohammad I.
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AbstractThe present paper deals with the dynamic behavior of a microelectromechanical systems (MEMS). The device consists of a clamped-clamped microbeam electrostatically and electrodynamically actuated. Our objective is to develop a theoretical analysis, which is able to describe and predict all the main relevant aspects of the experimental response. In the first part of the paper an extensive experimental investigation is conducted. The microbeam is perfectly straight. The first three experimental natural frequencies are identified and the nonlinear dynamics are explored at increasing values of electrodynamic excitation. Several backward and forward frequency sweeps are acquired. The nonlinear behavior is highlighted. The experimental data show the coexistence of the nonresonant and the resonant branch, which perform a bending toward higher frequencies values before undergoing jump or pull-in dynamics. This kind of bending is not particularly common in MEMS. In the second part of the paper, a theoretical single degree-of-freedom model is derived. The unknown parameters are extracted and settled via parametric identification. A single mode reduced-order model is considered, which is obtained via the Galerkin technique. To enhance the computational efficiency, the contribution of the electric force term is computed in advance and stored in a table. Extensive numerical simulations are performed at increasing values of electrodynamic excitation. They are observed to properly predict all the main nonlinear features arising in the device response. This occurs not only at low values of electrodynamic excitation, but also at higher ones
CitationRuzziconi L, Jaber N, Kosuru L, Bellaredj ML, Lenci S, et al. (2017) An Electrically Actuated Microbeam-Based MEMS Device: Experimental and Theoretical Investigation. Volume 6: 13th International Conference on Multibody Systems, Nonlinear Dynamics, and Control. Available: http://dx.doi.org/10.1115/detc2017-67579.
SponsorsThis work has been partly developed during Laura Ruzziconi’s stay at the King Abdullah University of Science and Technology (KAUST), Saudi Arabia. The kind hospitality is gratefully acknowledged. Laura Ruzziconi would like to thank KAUST for promoting and financially supporting the exchange collaboration. Mohammad I. Younis acknowledges KAUST funding to support this project.
JournalVolume 6: 13th International Conference on Multibody Systems, Nonlinear Dynamics, and Control
Conference/Event nameASME 2017 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE 2017