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    Active mems microbeam device for gas detection

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    WO2017168373A1.pdf
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    Description:
    Published Application
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    Type
    Patent
    Patent Status
    Published Application
    Authors
    Bouchaala, Adam M.
    Jaber, Nizar
    Younis, Mohammad I. cc
    Assignee
    King Abdullah University Of Science And Technology
    KAUST Department
    Mechanical Engineering Program
    Physical Science and Engineering (PSE) Division
    Date
    2017-10-05
    Submitted Date
    2016-03-31
    Permanent link to this record
    http://hdl.handle.net/10754/626571
    
    Metadata
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    Abstract
    Sensors and active switches for applications in gas detection and other fields are described. The devices are based on the softening and hardening nonlinear response behaviors of microelectromechanical systems (MEMS) clamped-clamped microbeams. In that context, embodiments of gas-triggered MEMS microbeam sensors and switches are described. The microbeam devices can be coated with a Metal-Organic Framework to achieve high sensitivity. For gas sensing, an amplitude-based tracking algorithm can be used to quantify an amount of gas captured by the devices according to frequency shift. Noise analysis is also conducted according to the embodiments, which shows that the microbeam devices have high stability against thermal noise. The microbeam devices are also suitable for the generation of binary sensing information for alarming, for example.
    Application Number
    WO 2017168373 A1
    Additional Links
    http://www.google.com/patents/WO2017168373A1
    http://worldwide.espacenet.com/publicationDetails/biblio?CC=WO&NR=2017168373A1&KC=A1&FT=D
    Collections
    Patents; Physical Science and Engineering (PSE) Division; Mechanical Engineering Program

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