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    A scalable pressure sensor based on an electrothermally and electrostatically operated resonator

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    Type
    Article
    Authors
    Hajjaj, Amal cc
    Alcheikh, Nouha cc
    Hafiz, Md Abdullah Al cc
    Ilyas, Saad cc
    Younis, Mohammad I. cc
    KAUST Department
    Mechanical Engineering Program
    Physical Science and Engineering (PSE) Division
    Date
    2017-11-29
    Online Publication Date
    2017-11-29
    Print Publication Date
    2017-11-27
    Permanent link to this record
    http://hdl.handle.net/10754/626366
    
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    Abstract
    We present a pressure sensor based on the convective cooling of the air surrounding an electrothermally heated resonant bridge. Unlike conventional pressure sensors that rely on diaphragm deformation in response to pressure, the sensor does not require diaphragms of the large surface area, and hence is scalable and can be realized even at the nanoscale. The concept is demonstrated using both straight and arch microbeam resonators driven and sensed electrostatically. The change in the surrounding pressure is shown to be accurately tracked by monitoring the change in the resonance frequency of the structure. The sensitivity of the sensor, which is controllable by the applied electrothermal load, is shown near 57 811 ppm/mbar for a pressure range from 1 to 10 Torr. We show that a straight beam operated near the buckling threshold leads to the maximum sensitivity of the device. The experimental data and simulation results, based on a multi-physics finite element model, demonstrate the feasibility and simplicity of the pressure sensor. Published by AIP Publishing.
    Citation
    Hajjaj AZ, Alcheikh N, Hafiz MAA, Ilyas S, Younis MI (2017) A scalable pressure sensor based on an electrothermally and electrostatically operated resonator. Applied Physics Letters 111: 223503. Available: http://dx.doi.org/10.1063/1.5003563.
    Sponsors
    This research was supported by the King Abdullah University of Science and Technology (KAUST) funds.
    Publisher
    AIP Publishing
    Journal
    Applied Physics Letters
    DOI
    10.1063/1.5003563
    Additional Links
    http://aip.scitation.org/doi/10.1063/1.5003563
    ae974a485f413a2113503eed53cd6c53
    10.1063/1.5003563
    Scopus Count
    Collections
    Articles; Physical Science and Engineering (PSE) Division; Mechanical Engineering Program

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